Fabrication of thermoelectric gas sensors on micro-hotplates

W. Shin, M. Nishibori, L. F. Houlet, T. Itoh, N. Izu, I. Matsubara

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

We present a series of fabrication processes of high-performance thermoelectric gas sensor micro-devices including a membrane-releasing process in KOH for the mass production of hot-plate type membrane devices. The fabricated devices are hydrogen gas sensors based on the thermoelectric detection of the catalytic hydrogen combustion. The KOH wet etching membrane-releasing process, using protective wax or polymer coating shows fabrication yields of over 70% and 80%. Most sensors detect wide range hydrogen concentration from several part-per-million, ppm, to percent in air demonstrating robust sensor process. As the device working principle of the Seebeck effect is linear phenomena, a good linear relationship between voltage signal and hydrogen concentration can be achieved, 1 mV = 1000 ppm, down to 50 ppm hydrogen in air. The test method for a large number of sensor devices has been developed, and the validation study for mass production of gas sensors is carried out.

Original languageEnglish
Pages (from-to)340-345
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume139
Issue number2
DOIs
Publication statusPublished - Jun 4 2009
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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