We present a series of fabrication processes of high-performance thermoelectric gas sensor micro-devices including a membrane-releasing process in KOH for the mass production of hot-plate type membrane devices. The fabricated devices are hydrogen gas sensors based on the thermoelectric detection of the catalytic hydrogen combustion. The KOH wet etching membrane-releasing process, using protective wax or polymer coating shows fabrication yields of over 70% and 80%. Most sensors detect wide range hydrogen concentration from several part-per-million, ppm, to percent in air demonstrating robust sensor process. As the device working principle of the Seebeck effect is linear phenomena, a good linear relationship between voltage signal and hydrogen concentration can be achieved, 1 mV = 1000 ppm, down to 50 ppm hydrogen in air. The test method for a large number of sensor devices has been developed, and the validation study for mass production of gas sensors is carried out.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry