TY - JOUR
T1 - Fabrication of thermoelectric gas sensors on micro-hotplates
AU - Shin, W.
AU - Nishibori, M.
AU - Houlet, L. F.
AU - Itoh, T.
AU - Izu, N.
AU - Matsubara, I.
N1 - Funding Information:
The development of micro thermoelectric gas sensor device was supported by the New Energy and Industrial Technology Development Organization (NEDO), Japan. Authors appreciate the state-of-art works of the microfabrication process by Y. Kurauchi, the catalyst deposition and packaging process by S. Aizawa, and the sensor performance test by K. Ishikawa.
PY - 2009/6/4
Y1 - 2009/6/4
N2 - We present a series of fabrication processes of high-performance thermoelectric gas sensor micro-devices including a membrane-releasing process in KOH for the mass production of hot-plate type membrane devices. The fabricated devices are hydrogen gas sensors based on the thermoelectric detection of the catalytic hydrogen combustion. The KOH wet etching membrane-releasing process, using protective wax or polymer coating shows fabrication yields of over 70% and 80%. Most sensors detect wide range hydrogen concentration from several part-per-million, ppm, to percent in air demonstrating robust sensor process. As the device working principle of the Seebeck effect is linear phenomena, a good linear relationship between voltage signal and hydrogen concentration can be achieved, 1 mV = 1000 ppm, down to 50 ppm hydrogen in air. The test method for a large number of sensor devices has been developed, and the validation study for mass production of gas sensors is carried out.
AB - We present a series of fabrication processes of high-performance thermoelectric gas sensor micro-devices including a membrane-releasing process in KOH for the mass production of hot-plate type membrane devices. The fabricated devices are hydrogen gas sensors based on the thermoelectric detection of the catalytic hydrogen combustion. The KOH wet etching membrane-releasing process, using protective wax or polymer coating shows fabrication yields of over 70% and 80%. Most sensors detect wide range hydrogen concentration from several part-per-million, ppm, to percent in air demonstrating robust sensor process. As the device working principle of the Seebeck effect is linear phenomena, a good linear relationship between voltage signal and hydrogen concentration can be achieved, 1 mV = 1000 ppm, down to 50 ppm hydrogen in air. The test method for a large number of sensor devices has been developed, and the validation study for mass production of gas sensors is carried out.
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U2 - 10.1016/j.snb.2009.03.032
DO - 10.1016/j.snb.2009.03.032
M3 - Article
AN - SCOPUS:66349097179
SN - 0925-4005
VL - 139
SP - 340
EP - 345
JO - Sensors and Actuators B: Chemical
JF - Sensors and Actuators B: Chemical
IS - 2
ER -