Fabrication of thin films by the ink-jet method onto the substrate with two-dimensionally controlled wetting properties

The purpose of this study is to establish the fundamental technology of site-selective coating of polymer or metal thin film utilizing wetting contrast of line-patterned substrate. Line-patterned fluoroalkylsilane monolayer with lyophobic/lyophilic area (line width 1-20 μm) was prepared through vacuum ultra violet photolithography process. Lyophobic and lyophilic areas were terminated with silanol and fluoroalkyl groups, respectively. On this surface, a macroscopic droplet of polymer solution or metal suspension shows anisotropic wetting behavior. Microscopic droplets of a xylene solution of polystyrene (PS), a xylene solution of polyfluorene (F8) or silver nanoparticle suspension were deposited on the micropatterned surface by the ink-jet method. The PS, F8 or silver thin films were selectively formed on the micropatterned lyophilic areas.