Abstract
Three-component micropatterned organosilane monolayer was successfully fabricated on Si-wafer substrate by a stepwise photolithography process. Scanning force microscopic observations revealed that three kinds of organosilane monolayers with different physicochemical properties were area-selectively immobilized on a Si wafer.
Original language | English |
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Pages (from-to) | 1196-1197 |
Number of pages | 2 |
Journal | Chemistry Letters |
Issue number | 12 |
DOIs | |
Publication status | Published - Dec 5 2002 |
All Science Journal Classification (ASJC) codes
- Chemistry(all)