Fabrication of three-component micropatterned organosilane monolayer by a stepwise photolithography process

Tomoyuki Koga, Hideyuki Otsuka, Atsushi Takahara

Research output: Contribution to journal › Article

17 Citations (Scopus)

Abstract

Three-component micropatterned organosilane monolayer was successfully fabricated on Si-wafer substrate by a stepwise photolithography process. Scanning force microscopic observations revealed that three kinds of organosilane monolayers with different physicochemical properties were area-selectively immobilized on a Si wafer.

Original languageEnglish
Pages (from-to)1196-1197
Number of pages2
JournalChemistry Letters
Issue number12
DOIs
Publication statusPublished - Dec 5 2002

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Photolithography
Monolayers
Fabrication
Scanning
Substrates

All Science Journal Classification (ASJC) codes

  • Chemistry(all)

Cite this

Fabrication of three-component micropatterned organosilane monolayer by a stepwise photolithography process. / Koga, Tomoyuki; Otsuka, Hideyuki; Takahara, Atsushi.

In: Chemistry Letters, No. 12, 05.12.2002, p. 1196-1197.

Research output: Contribution to journal › Article

Koga, T, Otsuka, H & Takahara, A 2002, 'Fabrication of three-component micropatterned organosilane monolayer by a stepwise photolithography process', Chemistry Letters, no. 12, pp. 1196-1197. https://doi.org/10.1246/cl.2002.1196
Koga T, Otsuka H, Takahara A. Fabrication of three-component micropatterned organosilane monolayer by a stepwise photolithography process. Chemistry Letters. 2002 Dec 5;(12):1196-1197. https://doi.org/10.1246/cl.2002.1196
Koga, Tomoyuki ; Otsuka, Hideyuki ; Takahara, Atsushi. / Fabrication of three-component micropatterned organosilane monolayer by a stepwise photolithography process. In: Chemistry Letters. 2002 ; No. 12. pp. 1196-1197.
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