Fabrication of vertical thin film FEA using ion-induced bending technique

T. Yoshida, C. Yasumuro, M. Nagao, S. Kanemaru, A. Baba, Tanemasa Asano

Research output: Contribution to conferencePaperpeer-review

2 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy

Medicine & Life Sciences