Fabrication of vertical thin film FEA using ion-induced bending technique

T. Yoshida, C. Yasumuro, M. Nagao, S. Kanemaru, A. Baba, Tanemasa Asano

Research output: Contribution to conferencePaperpeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication of vertical thin film FEA using ion-induced bending technique'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Medicine & Life Sciences

Chemical Compounds