TY - JOUR
T1 - Fabrication of YBCO film by TFA-MOD process at low-pressure atmosphere
AU - Teranishi, Ryo
AU - Honjo, Tetsuji
AU - Tokunaga, Yoshitaka
AU - Fuji, Hiroshi
AU - Matsuda, Junko
AU - Izumi, Teruo
AU - Yajima, Akimasa
AU - Shiohara, Yuh
N1 - Funding Information:
This work was supported by the New Energy and Industrial Technology Development Organization (NEDO) as Collaborative Research and Development of Fundamental Technologies for Superconductivity Applications. Also, the author would like to thank the Japan Society for the Promotion of Science for their support.
PY - 2004/10
Y1 - 2004/10
N2 - Influence of the process conditions, including the water partial pressure and the total annealing pressure, on YBa2Cu3O 7-y (YBCO) film growth has been investigated in order to increase the growth rate. YBCO films have been fabricated on SrTiO3 substrate by metal-organic deposition using trifluoroacetates (TFA) as a solute source under the low-pressure atmosphere. It was observed that the growth rate of the YBCO film was in proportion to the square root of the water partial pressure and was in inverse proportion to the total pressure. A higher YBCO growth rate was achieved about 3 times as fast as that under the atmospheric fabrication conditions with maintaining the high Jc performance. On the other hand, the volume fraction of a-axis oriented grains in the YBCO film was strongly dependent on the growth rate, a-axis oriented YBCO grains were clearly recognized in the films grown with either very low or very high growth rate. As a result, it was found that the growth region should be controlled to prevent from the growth of the a-axis oriented grains.
AB - Influence of the process conditions, including the water partial pressure and the total annealing pressure, on YBa2Cu3O 7-y (YBCO) film growth has been investigated in order to increase the growth rate. YBCO films have been fabricated on SrTiO3 substrate by metal-organic deposition using trifluoroacetates (TFA) as a solute source under the low-pressure atmosphere. It was observed that the growth rate of the YBCO film was in proportion to the square root of the water partial pressure and was in inverse proportion to the total pressure. A higher YBCO growth rate was achieved about 3 times as fast as that under the atmospheric fabrication conditions with maintaining the high Jc performance. On the other hand, the volume fraction of a-axis oriented grains in the YBCO film was strongly dependent on the growth rate, a-axis oriented YBCO grains were clearly recognized in the films grown with either very low or very high growth rate. As a result, it was found that the growth region should be controlled to prevent from the growth of the a-axis oriented grains.
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U2 - 10.1016/j.physc.2004.01.117
DO - 10.1016/j.physc.2004.01.117
M3 - Article
AN - SCOPUS:4644340666
SN - 0921-4534
VL - 412-414
SP - 920
EP - 925
JO - Physica C: Superconductivity and its Applications
JF - Physica C: Superconductivity and its Applications
IS - SPEC. ISS.
ER -