Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane (HMDS) without H2

Qingfang Xu, Peipei Zhu, Qingyun Sun, Rong Tu, Song Zhang, Meijun Yang, Qizhong Li, Ji Shi, Haiwen Li, Lianmeng Zhang, Takashi Goto, Mingxu Han, Jiasheng Yan, Shusen Li, Hitoshi Ohmori

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1471-1478
JournalJournal of the American Ceramic Society
Volume101
Publication statusPublished - 2017

Cite this

Xu, Q., Zhu, P., Sun, Q., Tu, R., Zhang, S., Yang, M., Li, Q., Shi, J., Li, H., Zhang, L., Goto, T., Han, M., Yan, J., Li, S., & Ohmori, H. (2017). Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane (HMDS) without H2. Journal of the American Ceramic Society, 101, 1471-1478.