Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane (HMDS) without H2

Qingfang Xu, Peipei Zhu, Qingyun Sun, Rong Tu, Song Zhang, Meijun Yang, Qizhong Li, Ji Shi, Haiwen Li, Lianmeng Zhang, Takashi Goto, Mingxu Han, Jiasheng Yan, Shusen Li, Hitoshi Ohmori

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1471-1478
JournalJournal of the American Ceramic Society
Volume101
Publication statusPublished - 2017

Cite this

Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane (HMDS) without H2. / Xu, Qingfang; Zhu, Peipei; Sun, Qingyun; Tu, Rong; Zhang, Song; Yang, Meijun; Li, Qizhong; Shi, Ji; Li, Haiwen; Zhang, Lianmeng ; Goto, Takashi; Han, Mingxu; Yan, Jiasheng; Li, Shusen; Ohmori, Hitoshi.

In: Journal of the American Ceramic Society, Vol. 101, 2017, p. 1471-1478.

Research output: Contribution to journalArticle

Xu, Q, Zhu, P, Sun, Q, Tu, R, Zhang, S, Yang, M, Li, Q, Shi, J, Li, H, Zhang, L, Goto, T, Han, M, Yan, J, Li, S & Ohmori, H 2017, 'Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane (HMDS) without H2', Journal of the American Ceramic Society, vol. 101, pp. 1471-1478.
Xu, Qingfang ; Zhu, Peipei ; Sun, Qingyun ; Tu, Rong ; Zhang, Song ; Yang, Meijun ; Li, Qizhong ; Shi, Ji ; Li, Haiwen ; Zhang, Lianmeng ; Goto, Takashi ; Han, Mingxu ; Yan, Jiasheng ; Li, Shusen ; Ohmori, Hitoshi. / Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane (HMDS) without H2. In: Journal of the American Ceramic Society. 2017 ; Vol. 101. pp. 1471-1478.
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title = "Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane (HMDS) without H2",
author = "Qingfang Xu and Peipei Zhu and Qingyun Sun and Rong Tu and Song Zhang and Meijun Yang and Qizhong Li and Ji Shi and Haiwen Li and Lianmeng Zhang and Takashi Goto and Mingxu Han and Jiasheng Yan and Shusen Li and Hitoshi Ohmori",
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journal = "Journal of the American Ceramic Society",
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TY - JOUR

T1 - Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane (HMDS) without H2

AU - Xu, Qingfang

AU - Zhu, Peipei

AU - Sun, Qingyun

AU - Tu, Rong

AU - Zhang, Song

AU - Yang, Meijun

AU - Li, Qizhong

AU - Shi, Ji

AU - Li, Haiwen

AU - Zhang, Lianmeng

AU - Goto, Takashi

AU - Han, Mingxu

AU - Yan, Jiasheng

AU - Li, Shusen

AU - Ohmori, Hitoshi

PY - 2017

Y1 - 2017

M3 - Article

VL - 101

SP - 1471

EP - 1478

JO - Journal of the American Ceramic Society

JF - Journal of the American Ceramic Society

SN - 0002-7820

ER -