Fe-N Thin Films Prepared by Excimer Laser Ablation

T. Yoshitake, M. Ohkoshi, K. Tsushima

Research output: Contribution to journalArticle

Abstract

Fe-N films were deposited on glass substrates at room temperature using a pulsed KrF excimer laser (wavelength 248 nm, pulse width 27 ns). The film composition and structure depend on the ambient N2 pressure, the laser pulse energy, and the repetition rate. In order to understand the interaction between light-emitting ablated particles produced by excimer laser ablation of Fe and ambient N2 gas, the dynamics of ablated plumes were investigated by means of a high-speed framing streak camera and time-resolved emission spectroscopy. Two distinct components of ablated particles were observed. One consisted of a spherical plume with an average velocity of over 100 km/s, which was observed for about 300 ns from the laser irradiation. The other consisted of a columnar plume with a maximum velocity of 22 km/s, which was observed for 1 to 10 µs. The velocity of the Fe radicals depends on the N2 pressure, which contributes to formation of the Fe-N film.

Original languageEnglish
Pages (from-to)146-152
Number of pages7
JournalIEEE Translation Journal on Magnetics in Japan
Volume9
Issue number6
DOIs
Publication statusPublished - Jan 1 1994

Fingerprint

Excimer lasers
Laser ablation
Thin films
Laser pulses
Streak cameras
High speed cameras
Emission spectroscopy
Laser beam effects
Pulsed lasers
Glass
Wavelength
Substrates
Chemical analysis
Gases
Temperature

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

Cite this

Fe-N Thin Films Prepared by Excimer Laser Ablation. / Yoshitake, T.; Ohkoshi, M.; Tsushima, K.

In: IEEE Translation Journal on Magnetics in Japan, Vol. 9, No. 6, 01.01.1994, p. 146-152.

Research output: Contribution to journalArticle

Yoshitake, T. ; Ohkoshi, M. ; Tsushima, K. / Fe-N Thin Films Prepared by Excimer Laser Ablation. In: IEEE Translation Journal on Magnetics in Japan. 1994 ; Vol. 9, No. 6. pp. 146-152.
@article{4e58c2c689ea44e39ae9952050d83418,
title = "Fe-N Thin Films Prepared by Excimer Laser Ablation",
abstract = "Fe-N films were deposited on glass substrates at room temperature using a pulsed KrF excimer laser (wavelength 248 nm, pulse width 27 ns). The film composition and structure depend on the ambient N2 pressure, the laser pulse energy, and the repetition rate. In order to understand the interaction between light-emitting ablated particles produced by excimer laser ablation of Fe and ambient N2 gas, the dynamics of ablated plumes were investigated by means of a high-speed framing streak camera and time-resolved emission spectroscopy. Two distinct components of ablated particles were observed. One consisted of a spherical plume with an average velocity of over 100 km/s, which was observed for about 300 ns from the laser irradiation. The other consisted of a columnar plume with a maximum velocity of 22 km/s, which was observed for 1 to 10 µs. The velocity of the Fe radicals depends on the N2 pressure, which contributes to formation of the Fe-N film.",
author = "T. Yoshitake and M. Ohkoshi and K. Tsushima",
year = "1994",
month = "1",
day = "1",
doi = "10.1109/TJMJ.1994.4565972",
language = "English",
volume = "9",
pages = "146--152",
journal = "IEEE Translation Journal on Magnetics in Japan",
issn = "0882-4959",
number = "6",

}

TY - JOUR

T1 - Fe-N Thin Films Prepared by Excimer Laser Ablation

AU - Yoshitake, T.

AU - Ohkoshi, M.

AU - Tsushima, K.

PY - 1994/1/1

Y1 - 1994/1/1

N2 - Fe-N films were deposited on glass substrates at room temperature using a pulsed KrF excimer laser (wavelength 248 nm, pulse width 27 ns). The film composition and structure depend on the ambient N2 pressure, the laser pulse energy, and the repetition rate. In order to understand the interaction between light-emitting ablated particles produced by excimer laser ablation of Fe and ambient N2 gas, the dynamics of ablated plumes were investigated by means of a high-speed framing streak camera and time-resolved emission spectroscopy. Two distinct components of ablated particles were observed. One consisted of a spherical plume with an average velocity of over 100 km/s, which was observed for about 300 ns from the laser irradiation. The other consisted of a columnar plume with a maximum velocity of 22 km/s, which was observed for 1 to 10 µs. The velocity of the Fe radicals depends on the N2 pressure, which contributes to formation of the Fe-N film.

AB - Fe-N films were deposited on glass substrates at room temperature using a pulsed KrF excimer laser (wavelength 248 nm, pulse width 27 ns). The film composition and structure depend on the ambient N2 pressure, the laser pulse energy, and the repetition rate. In order to understand the interaction between light-emitting ablated particles produced by excimer laser ablation of Fe and ambient N2 gas, the dynamics of ablated plumes were investigated by means of a high-speed framing streak camera and time-resolved emission spectroscopy. Two distinct components of ablated particles were observed. One consisted of a spherical plume with an average velocity of over 100 km/s, which was observed for about 300 ns from the laser irradiation. The other consisted of a columnar plume with a maximum velocity of 22 km/s, which was observed for 1 to 10 µs. The velocity of the Fe radicals depends on the N2 pressure, which contributes to formation of the Fe-N film.

UR - http://www.scopus.com/inward/record.url?scp=84939755292&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84939755292&partnerID=8YFLogxK

U2 - 10.1109/TJMJ.1994.4565972

DO - 10.1109/TJMJ.1994.4565972

M3 - Article

AN - SCOPUS:84939755292

VL - 9

SP - 146

EP - 152

JO - IEEE Translation Journal on Magnetics in Japan

JF - IEEE Translation Journal on Magnetics in Japan

SN - 0882-4959

IS - 6

ER -