Feasibility study of a novel technique for measurement of liquid thermal conductivity with a micro-beam sensor

Hiroshi Takamatsu, Kyosuke Inada, Satoru Uchida, Koji Takahashi, Motoo Fujii

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A new method was proposed to measure the thermal conductivity of liquids with infinitesimal samples, which are much smaller than those required in conventional methods. The method utilizes a micro-beam-type MEMS sensor fabricated across a trench on a silicon substrate. Numerical analysis of heat conduction within and around a uniformly heated sensor showed that the temperature of a 10 μm long sensor reached a steady state within approximately 0.1 ms, after the start of heating. It was also revealed that the average temperature of the sensor at the steady state was higher in liquids with lower thermal conductivity. These results demonstrate a new idea of measuring the thermal conductivity of liquids within an extremely short time at a steady state before the onset of natural convection.

Original languageEnglish
Pages (from-to)888-899
Number of pages12
JournalInternational Journal of Thermophysics
Volume31
Issue number4-5
DOIs
Publication statusPublished - May 1 2010

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thermal conductivity
sensors
liquids
free convection
conductive heat transfer
microelectromechanical systems
numerical analysis
heating
temperature
silicon

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

Cite this

Feasibility study of a novel technique for measurement of liquid thermal conductivity with a micro-beam sensor. / Takamatsu, Hiroshi; Inada, Kyosuke; Uchida, Satoru; Takahashi, Koji; Fujii, Motoo.

In: International Journal of Thermophysics, Vol. 31, No. 4-5, 01.05.2010, p. 888-899.

Research output: Contribution to journalArticle

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