Ferroelectric phase stabilization of HfO2 by nitrogen doping

Lun Xu, Tomonori Nishimura, Shigehisa Shibayama, Takeaki Yajima, Shinji Migita, Akira Toriumi

Research output: Contribution to journalArticlepeer-review

52 Citations (Scopus)

Abstract

We report that nitrogen (N) doping can drive the ferroelectricity of HfO2. It was found that N doping can cause the transition from a monoclinic phase to a highly symmetric phase. The role of N doping is discussed from the viewpoints of charge balance and bond-constraining effects. The former is responsible for the structural transformation from a paraelectric phase to a ferroelectric phase by forming an oxygen vacancy. In addition, Hf-N and N-O bonds with covalent characteristics have strong effects on HfO2 structural and electrical properties, and thus contribute to a marked HfO2 para-/ferroelectric transition.

Original languageEnglish
Article number091501
JournalApplied Physics Express
Volume9
Issue number9
DOIs
Publication statusPublished - Sep 2016
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Ferroelectric phase stabilization of HfO<sub>2</sub> by nitrogen doping'. Together they form a unique fingerprint.

Cite this