TY - JOUR
T1 - Ferroelectric phase stabilization of HfO2 by nitrogen doping
AU - Xu, Lun
AU - Nishimura, Tomonori
AU - Shibayama, Shigehisa
AU - Yajima, Takeaki
AU - Migita, Shinji
AU - Toriumi, Akira
N1 - Publisher Copyright:
© 2016 The Japan Society of Applied Physics.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2016/9
Y1 - 2016/9
N2 - We report that nitrogen (N) doping can drive the ferroelectricity of HfO2. It was found that N doping can cause the transition from a monoclinic phase to a highly symmetric phase. The role of N doping is discussed from the viewpoints of charge balance and bond-constraining effects. The former is responsible for the structural transformation from a paraelectric phase to a ferroelectric phase by forming an oxygen vacancy. In addition, Hf-N and N-O bonds with covalent characteristics have strong effects on HfO2 structural and electrical properties, and thus contribute to a marked HfO2 para-/ferroelectric transition.
AB - We report that nitrogen (N) doping can drive the ferroelectricity of HfO2. It was found that N doping can cause the transition from a monoclinic phase to a highly symmetric phase. The role of N doping is discussed from the viewpoints of charge balance and bond-constraining effects. The former is responsible for the structural transformation from a paraelectric phase to a ferroelectric phase by forming an oxygen vacancy. In addition, Hf-N and N-O bonds with covalent characteristics have strong effects on HfO2 structural and electrical properties, and thus contribute to a marked HfO2 para-/ferroelectric transition.
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U2 - 10.7567/APEX.9.091501
DO - 10.7567/APEX.9.091501
M3 - Article
AN - SCOPUS:84987668918
SN - 1882-0778
VL - 9
JO - Applied Physics Express
JF - Applied Physics Express
IS - 9
M1 - 091501
ER -