Field effect transistor type CO2 sensor attached with metal carbonate auxiliary phase

K. Shimanoe, K. Goto, K. Obata, S. Nakata, G. Sakai, N. Yamazoe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

FET type CO2 sensor operative at room temperature was developed by combining with a metal carbonate auxiliary phase and metal oxide sensing electrode. In an attempt to lower the operating temperature and reduce the humidity dependence, the structure with Li2CO3-BaCO3(1:3)-ITO/Na+ exchange membrane/FET was fabricated. The resulting device exhibited fairly excellent CO2 sensing characteristics at room temperature (30°C), although the other devices failed to work at room temperature or suffered disturbance by humidity seriously. The V/sub GS/ for the best device obtained was linear to the logarithm of the CO2 concentration, with its slopes indicating n=2.0 of theoretical value where n is the number of reaction electrons involved in the electrochemical reduction per CO2. The times for 90% response and 90% recovery to switching-on and-off 3000 ppm CO2 were 1 and 2 min, respectively, and all of the response transients reproduced very well in the successive runs.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages65-68
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - Jan 1 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Shimanoe, K., Goto, K., Obata, K., Nakata, S., Sakai, G., & Yamazoe, N. (2003). Field effect transistor type CO2 sensor attached with metal carbonate auxiliary phase. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 65-68). [1215254] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215254