Field effect transistor type CO2 sensor attached with metal carbonate auxiliary phase

Kengo Shimanoe, K. Goto, K. Obata, S. Nakata, G. Sakai, N. Yamazoe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

FET type CO2 sensor operative at room temperature was developed by combining with a metal carbonate auxiliary phase and metal oxide sensing electrode. In an attempt to lower the operating temperature and reduce the humidity dependence, the structure with Li2CO3-BaCO3(1:3)-ITO/Na+ exchange membrane/FET was fabricated. The resulting device exhibited fairly excellent CO2 sensing characteristics at room temperature (30°C), although the other devices failed to work at room temperature or suffered disturbance by humidity seriously. The V/sub GS/ for the best device obtained was linear to the logarithm of the CO2 concentration, with its slopes indicating n=2.0 of theoretical value where n is the number of reaction electrons involved in the electrochemical reduction per CO2. The times for 90% response and 90% recovery to switching-on and-off 3000 ppm CO2 were 1 and 2 min, respectively, and all of the response transients reproduced very well in the successive runs.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages65-68
Number of pages4
Volume1
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Fingerprint

Field effect transistors
Carbonates
Sensors
Metals
Atmospheric humidity
Temperature
Transient analysis
Membranes
Recovery
Electrodes
Oxides
Electrons

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Shimanoe, K., Goto, K., Obata, K., Nakata, S., Sakai, G., & Yamazoe, N. (2003). Field effect transistor type CO2 sensor attached with metal carbonate auxiliary phase. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 1, pp. 65-68). [1215254] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215254

Field effect transistor type CO2 sensor attached with metal carbonate auxiliary phase. / Shimanoe, Kengo; Goto, K.; Obata, K.; Nakata, S.; Sakai, G.; Yamazoe, N.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. p. 65-68 1215254.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shimanoe, K, Goto, K, Obata, K, Nakata, S, Sakai, G & Yamazoe, N 2003, Field effect transistor type CO2 sensor attached with metal carbonate auxiliary phase. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. vol. 1, 1215254, Institute of Electrical and Electronics Engineers Inc., pp. 65-68, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 6/8/03. https://doi.org/10.1109/SENSOR.2003.1215254
Shimanoe K, Goto K, Obata K, Nakata S, Sakai G, Yamazoe N. Field effect transistor type CO2 sensor attached with metal carbonate auxiliary phase. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1. Institute of Electrical and Electronics Engineers Inc. 2003. p. 65-68. 1215254 https://doi.org/10.1109/SENSOR.2003.1215254
Shimanoe, Kengo ; Goto, K. ; Obata, K. ; Nakata, S. ; Sakai, G. ; Yamazoe, N. / Field effect transistor type CO2 sensor attached with metal carbonate auxiliary phase. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. pp. 65-68
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