Field electron emission from nano-pillarets prepared by RIE of organic materials

Akiyoshi Baba, Tanemasa Asano

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)


We have investigated the feasibility of nano-pillarets prepared by a reactive ion etching (RIE) with oxygen gas of organic materials for application to a field electron emitter. Photoresist, polyimide, ion-beam modified photoresist, and high purity carbon were used as test materials. A plasma reactor and RIE equipment were used to fabricate the nano-pillarets. It was found that the damage of oxygen ion irradiation at the surface of the organic material was required to form nano-pillarets. Field emission characteristics were measured with a diode structure. It was found that conductive nano-pillarets emit electrons at rather low-voltage. Field emission current of the order of 10-6 A was obtained from nano-pillarets made from the ion-beam modified photoresist. The emission current fluctuation of 20% was obtained.

Original languageEnglish
Pages (from-to)1185-1188
Number of pages4
JournalSID Conference Record of the International Display Research Conference
Publication statusPublished - Dec 1 2001
EventAsia Display/IDW 2001 - Nagoya, Japan
Duration: Oct 16 2002Oct 19 2002

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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