Field emission characteristics of defect-controlled polyimide tunneling cathode

Akiyoshi Baba, Tomoya Yoshida, Tanemasa Asano

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3 Citations (Scopus)

Abstract

A novel defect-controlled tunneling was proposed by using ion-beam modified polyimide film as a tunneling insulator. The triode configuration was used to measure the emission characteristics and energy distribution of emitted electrons. It was observed that as the applied gate voltage increased the peak of energy distribution of emitted electron was raised. It was also observed that the electron energy distribution analysis shows that hot electrons generated in the cathode were emitted in vacuum.

Original languageEnglish
Pages (from-to)1353-1357
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number3
Publication statusPublished - May 1 2004

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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