Field emission from metal particles bound with a photoresist

Akiyoshi Baba, Tanemasa Asano

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Field emission of electrons from fine palladium particles bound with insulating material was demonstrated. The threshold voltage for electron emission was drastically decreased as the result of an aging phenomenon. This aging was caused by material modification and/or cleaning of the palladium particles induced by local heating. After aging, electron emission stabilized and current fluctuations as low as 10% were obtained.

Original languageEnglish
Pages (from-to)552-556
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number1 SPEC.
DOIs
Publication statusPublished - Jan 1 2003

Fingerprint

metal particles
Photoresists
photoresists
Field emission
field emission
Aging of materials
Electron emission
electron emission
Palladium
palladium
Metals
Insulating materials
Threshold voltage
insulation
threshold voltage
cleaning
Cleaning
Heating
heating
Electrons

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Field emission from metal particles bound with a photoresist. / Baba, Akiyoshi; Asano, Tanemasa.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 1 SPEC., 01.01.2003, p. 552-556.

Research output: Contribution to journalArticle

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