Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation

Tsuyoshi Fujimura; Yukinori Kuroki; Tohru Hisakado; Akihiro Ikeda; Reiji Hattori; Yousuke Hakiai; Masanori Hidaka; Jae Young Choi; Suk Sang Chang

doi:10.1143/jjap.40.916

Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation

Tsuyoshi Fujimura, Yukinori Kuroki, Tohru Hisakado, Akihiro Ikeda, Reiji Hattori, Yousuke Hakiai, Masanori Hidaka, Jae Young Choi, Suk Sang Chang

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Variations in the etch depth and refractive index of polymethylmethacrylate (PMMA) films of different molecular weights after synchrotron radiation (SR) irradiation are investigated. Reduction of the PMMA film molecular weight, density and thickness are observed after SR irradiation. The amount of film thickness loss depends on not only initial molecular weight but also film density. The PMMA density difference at the start of SR exposure affects the etch depth after SR ablation.

Original language	English
Pages (from-to)	916-917
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	40
Issue number	2 A
DOIs	https://doi.org/10.1143/jjap.40.916
Publication status	Published - Feb 2001

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.40.916

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Fujimura, T., Kuroki, Y., Hisakado, T., Ikeda, A., Hattori, R., Hakiai, Y., Hidaka, M., Choi, J. Y., & Chang, S. S. (2001). Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 40(2 A), 916-917. https://doi.org/10.1143/jjap.40.916

Fujimura, T, Kuroki, Y, Hisakado, T, Ikeda, A, Hattori, R, Hakiai, Y, Hidaka, M, Choi, JY & Chang, SS 2001, 'Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 40, no. 2 A, pp. 916-917. https://doi.org/10.1143/jjap.40.916

@article{f94db309717e4b278d9a2e8a994da750,

title = "Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation",

abstract = "Variations in the etch depth and refractive index of polymethylmethacrylate (PMMA) films of different molecular weights after synchrotron radiation (SR) irradiation are investigated. Reduction of the PMMA film molecular weight, density and thickness are observed after SR irradiation. The amount of film thickness loss depends on not only initial molecular weight but also film density. The PMMA density difference at the start of SR exposure affects the etch depth after SR ablation.",

author = "Tsuyoshi Fujimura and Yukinori Kuroki and Tohru Hisakado and Akihiro Ikeda and Reiji Hattori and Yousuke Hakiai and Masanori Hidaka and Choi, {Jae Young} and Chang, {Suk Sang}",

year = "2001",

month = feb,

doi = "10.1143/jjap.40.916",

language = "English",

volume = "40",

pages = "916--917",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Institute of Physics",

number = "2 A",

}

TY - JOUR

T1 - Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation

AU - Fujimura, Tsuyoshi

AU - Kuroki, Yukinori

AU - Hisakado, Tohru

AU - Ikeda, Akihiro

AU - Hattori, Reiji

AU - Hakiai, Yousuke

AU - Hidaka, Masanori

AU - Choi, Jae Young

AU - Chang, Suk Sang

PY - 2001/2

Y1 - 2001/2

N2 - Variations in the etch depth and refractive index of polymethylmethacrylate (PMMA) films of different molecular weights after synchrotron radiation (SR) irradiation are investigated. Reduction of the PMMA film molecular weight, density and thickness are observed after SR irradiation. The amount of film thickness loss depends on not only initial molecular weight but also film density. The PMMA density difference at the start of SR exposure affects the etch depth after SR ablation.

AB - Variations in the etch depth and refractive index of polymethylmethacrylate (PMMA) films of different molecular weights after synchrotron radiation (SR) irradiation are investigated. Reduction of the PMMA film molecular weight, density and thickness are observed after SR irradiation. The amount of film thickness loss depends on not only initial molecular weight but also film density. The PMMA density difference at the start of SR exposure affects the etch depth after SR ablation.

UR - http://www.scopus.com/inward/record.url?scp=0035246244&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035246244&partnerID=8YFLogxK

U2 - 10.1143/jjap.40.916

DO - 10.1143/jjap.40.916

M3 - Article

AN - SCOPUS:0035246244

SN - 0021-4922

VL - 40

SP - 916

EP - 917

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 2 A

ER -

Film density dependence of polymethylmethacrylate ablation under synchrotron radiation irradiation

Abstract

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