First X-ray imaging with a micromachined Wolter type-I telescope

Tomohiro Ogawa; Yuichiro Ezoe; Takuya Kakiuchi; Masahiro Ikuta; Mayu Sato; Kasumi Nakamura; Masaki Numazawa; Kazuma Takeuchi; Masaru Terada; Takaya Ohashi; Ikuyuki Mitsuishi; Kumi Ishikawa; Kazuhisa Mitsuda; Kohei Morishita; Kazuo Nakajima

doi:10.1007/s00542-016-2906-3

First X-ray imaging with a micromachined Wolter type-I telescope

Tomohiro Ogawa, Yuichiro Ezoe, Takuya Kakiuchi, Masahiro Ikuta, Mayu Sato, Kasumi Nakamura, Masaki Numazawa, Kazuma Takeuchi, Masaru Terada, Takaya Ohashi, Ikuyuki Mitsuishi, Kumi Ishikawa, Kazuhisa Mitsuda, Kohei Morishita, Kazuo Nakajima

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

A light-weight Wolter type-I telescope for future space X-ray observations is prototyped by using micromachining technologies. Curvilinear micro pores with a width of 20 μ m are fabricated with deep reactive ion etching. Sidewalls of the pores are smoothed with high temperature annealing. Then, two wafers are deformed to different curvature radii, 1000 and 333 mm. The two wafers are aligned using parallel X-ray beams which are dominated by Al-K_α line at 1.49 keV. High angular and positional accuracies of the order of arcsec and μ m are achieved using movable stages. The first clear X-ray focusing is confirmed. Its angular resolution is 4.1 arcmin in full width half maximum while it is at least 92 arcmin in half power width. The effective area is 19.0 mm² which is ∼ 5 times smaller than a model calculation. We discuss causes of the degraded angular resolution and effective area and also future improvements.

Original language	English
Pages (from-to)	1101-1116
Number of pages	16
Journal	Microsystem Technologies
Volume	23
Issue number	4
DOIs	https://doi.org/10.1007/s00542-016-2906-3
Publication status	Published - Apr 1 2017
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Hardware and Architecture
Electrical and Electronic Engineering

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10.1007/s00542-016-2906-3

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title = "First X-ray imaging with a micromachined Wolter type-I telescope",

abstract = "A light-weight Wolter type-I telescope for future space X-ray observations is prototyped by using micromachining technologies. Curvilinear micro pores with a width of 20 μ m are fabricated with deep reactive ion etching. Sidewalls of the pores are smoothed with high temperature annealing. Then, two wafers are deformed to different curvature radii, 1000 and 333 mm. The two wafers are aligned using parallel X-ray beams which are dominated by Al-Kα line at 1.49 keV. High angular and positional accuracies of the order of arcsec and μ m are achieved using movable stages. The first clear X-ray focusing is confirmed. Its angular resolution is 4.1 arcmin in full width half maximum while it is at least 92 arcmin in half power width. The effective area is 19.0 mm2 which is ∼ 5 times smaller than a model calculation. We discuss causes of the degraded angular resolution and effective area and also future improvements.",

author = "Tomohiro Ogawa and Yuichiro Ezoe and Takuya Kakiuchi and Masahiro Ikuta and Mayu Sato and Kasumi Nakamura and Masaki Numazawa and Kazuma Takeuchi and Masaru Terada and Takaya Ohashi and Ikuyuki Mitsuishi and Kumi Ishikawa and Kazuhisa Mitsuda and Kohei Morishita and Kazuo Nakajima",

note = "Funding Information: The authors would like to express their deepest gratitude to the ISAS/JAXA beamline team and Dr. Makoto Mita for technical support for this study. Careful reading and comments on the manuscript by Dr. Magnus Axelsson are gratefully acknowledged. This work was financially supported by Grant-in-Aid for Young Scientists A 23684009 and Grant-in-Aid for JSPS Fellows 13J05865. Publisher Copyright: {\textcopyright} 2016, Springer-Verlag Berlin Heidelberg.",

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doi = "10.1007/s00542-016-2906-3",

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T1 - First X-ray imaging with a micromachined Wolter type-I telescope

AU - Ogawa, Tomohiro

AU - Ezoe, Yuichiro

AU - Kakiuchi, Takuya

AU - Ikuta, Masahiro

AU - Sato, Mayu

AU - Nakamura, Kasumi

AU - Numazawa, Masaki

AU - Takeuchi, Kazuma

AU - Terada, Masaru

AU - Ohashi, Takaya

AU - Mitsuishi, Ikuyuki

AU - Ishikawa, Kumi

AU - Mitsuda, Kazuhisa

AU - Morishita, Kohei

AU - Nakajima, Kazuo

N1 - Funding Information: The authors would like to express their deepest gratitude to the ISAS/JAXA beamline team and Dr. Makoto Mita for technical support for this study. Careful reading and comments on the manuscript by Dr. Magnus Axelsson are gratefully acknowledged. This work was financially supported by Grant-in-Aid for Young Scientists A 23684009 and Grant-in-Aid for JSPS Fellows 13J05865. Publisher Copyright: © 2016, Springer-Verlag Berlin Heidelberg.

PY - 2017/4/1

Y1 - 2017/4/1

N2 - A light-weight Wolter type-I telescope for future space X-ray observations is prototyped by using micromachining technologies. Curvilinear micro pores with a width of 20 μ m are fabricated with deep reactive ion etching. Sidewalls of the pores are smoothed with high temperature annealing. Then, two wafers are deformed to different curvature radii, 1000 and 333 mm. The two wafers are aligned using parallel X-ray beams which are dominated by Al-Kα line at 1.49 keV. High angular and positional accuracies of the order of arcsec and μ m are achieved using movable stages. The first clear X-ray focusing is confirmed. Its angular resolution is 4.1 arcmin in full width half maximum while it is at least 92 arcmin in half power width. The effective area is 19.0 mm2 which is ∼ 5 times smaller than a model calculation. We discuss causes of the degraded angular resolution and effective area and also future improvements.

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First X-ray imaging with a micromachined Wolter type-I telescope

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