Abstract
Patternable actuator film for monolithic soft micro robot process was developed. The film is consisted from thermal bimorph actuation layer and extra functional layer including driving heater layer and elastic mechanical buffer layer. A cantilever arm actuator fabricated by patterning the film was operated with 2 V applied voltage. Multi actuator device or micro robot can be fabricated without assembling process by appropriate patterning process with this film.
Original language | English |
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Title of host publication | 2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 9781538647073 |
DOIs | |
Publication status | Published - Dec 26 2018 |
Event | 17th IEEE SENSORS Conference, SENSORS 2018 - New Delhi, India Duration: Oct 28 2018 → Oct 31 2018 |
Publication series
Name | Proceedings of IEEE Sensors |
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Volume | 2018-October |
ISSN (Print) | 1930-0395 |
ISSN (Electronic) | 2168-9229 |
Other
Other | 17th IEEE SENSORS Conference, SENSORS 2018 |
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Country | India |
City | New Delhi |
Period | 10/28/18 → 10/31/18 |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
Cite this
Flexible Thermal Actuator Film for Monolithic Soft Micro Robot Process. / Sassa, Fumihiro; Hayashi, Kenshi.
2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2018. 8589717 (Proceedings of IEEE Sensors; Vol. 2018-October).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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TY - GEN
T1 - Flexible Thermal Actuator Film for Monolithic Soft Micro Robot Process
AU - Sassa, Fumihiro
AU - Hayashi, Kenshi
PY - 2018/12/26
Y1 - 2018/12/26
N2 - Patternable actuator film for monolithic soft micro robot process was developed. The film is consisted from thermal bimorph actuation layer and extra functional layer including driving heater layer and elastic mechanical buffer layer. A cantilever arm actuator fabricated by patterning the film was operated with 2 V applied voltage. Multi actuator device or micro robot can be fabricated without assembling process by appropriate patterning process with this film.
AB - Patternable actuator film for monolithic soft micro robot process was developed. The film is consisted from thermal bimorph actuation layer and extra functional layer including driving heater layer and elastic mechanical buffer layer. A cantilever arm actuator fabricated by patterning the film was operated with 2 V applied voltage. Multi actuator device or micro robot can be fabricated without assembling process by appropriate patterning process with this film.
UR - http://www.scopus.com/inward/record.url?scp=85060891784&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85060891784&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2018.8589717
DO - 10.1109/ICSENS.2018.8589717
M3 - Conference contribution
AN - SCOPUS:85060891784
T3 - Proceedings of IEEE Sensors
BT - 2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
ER -