@inproceedings{43b01327e05441b3877fc2b5eeb0dc3b,
title = "Flexible Thermal Actuator Film for Monolithic Soft Micro Robot Process",
abstract = "Patternable actuator film for monolithic soft micro robot process was developed. The film is consisted from thermal bimorph actuation layer and extra functional layer including driving heater layer and elastic mechanical buffer layer. A cantilever arm actuator fabricated by patterning the film was operated with 2 V applied voltage. Multi actuator device or micro robot can be fabricated without assembling process by appropriate patterning process with this film.",
author = "Fumihiro Sassa and Kenshi Hayashi",
year = "2018",
month = dec,
day = "26",
doi = "10.1109/ICSENS.2018.8589717",
language = "English",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings",
address = "United States",
note = "17th IEEE SENSORS Conference, SENSORS 2018 ; Conference date: 28-10-2018 Through 31-10-2018",
}