Flow mode transition and its effects on crystal-melt interface shape and oxygen distribution for Czochralski-grown Si single crystals

Masahito Watanabe, Minoru Eguchi, Koichi Kakimoto, Haruhiko Ono, Shigeru Kimura, Taketoshi Hibiya

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

Flow visualization and crystal growth experiments confirm that the crystal-melt interface shape of the Czochralski-grown silicon crystal is changed by the flow-mode transition of molten silicon caused by the baroclinic instability. They also confirm that the oxygen distribution in the grown crystal is modified by the flow-mode transition. The flow visualization and crystal growth experiments were carried out under the same conditions. The shape of the crystal-melt interface was identified from the growth striation shape in the grown crystal by X-ray topography. The oxygen distribution in the grown crystal was studied using micro Fourier-transform infrared absorption spectroscopy. The crystal-melt interface was changed from a convex to a gull-winged shape by the transition from a non-axisymmetric flow with vortices to an axisymmetric flow. The oxygen distribution along the growth direction in the crystal grown under the axisymmetric flow was more homogeneous than that grown under the non-axisymmetric flow. Experimental results suggest that an inhomogeneous oxygen distribution could result from thermal asymmetry generated by rotating vortices in the non-axisymmetric flow.

Original languageEnglish
Pages (from-to)285-290
Number of pages6
JournalJournal of Crystal Growth
Volume151
Issue number3-4
DOIs
Publication statusPublished - Jun 1 1995
Externally publishedYes

Fingerprint

Single crystals
Oxygen
Crystals
single crystals
oxygen
crystals
axisymmetric flow
flow visualization
Silicon
Flow visualization
Crystallization
Crystal growth
crystal growth
Vortex flow
baroclinic instability
vortices
striation
Infrared absorption
silicon
Absorption spectroscopy

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

Cite this

Flow mode transition and its effects on crystal-melt interface shape and oxygen distribution for Czochralski-grown Si single crystals. / Watanabe, Masahito; Eguchi, Minoru; Kakimoto, Koichi; Ono, Haruhiko; Kimura, Shigeru; Hibiya, Taketoshi.

In: Journal of Crystal Growth, Vol. 151, No. 3-4, 01.06.1995, p. 285-290.

Research output: Contribution to journalArticle

Watanabe, Masahito ; Eguchi, Minoru ; Kakimoto, Koichi ; Ono, Haruhiko ; Kimura, Shigeru ; Hibiya, Taketoshi. / Flow mode transition and its effects on crystal-melt interface shape and oxygen distribution for Czochralski-grown Si single crystals. In: Journal of Crystal Growth. 1995 ; Vol. 151, No. 3-4. pp. 285-290.
@article{7e26bb99566440cdb5fc722980265b83,
title = "Flow mode transition and its effects on crystal-melt interface shape and oxygen distribution for Czochralski-grown Si single crystals",
abstract = "Flow visualization and crystal growth experiments confirm that the crystal-melt interface shape of the Czochralski-grown silicon crystal is changed by the flow-mode transition of molten silicon caused by the baroclinic instability. They also confirm that the oxygen distribution in the grown crystal is modified by the flow-mode transition. The flow visualization and crystal growth experiments were carried out under the same conditions. The shape of the crystal-melt interface was identified from the growth striation shape in the grown crystal by X-ray topography. The oxygen distribution in the grown crystal was studied using micro Fourier-transform infrared absorption spectroscopy. The crystal-melt interface was changed from a convex to a gull-winged shape by the transition from a non-axisymmetric flow with vortices to an axisymmetric flow. The oxygen distribution along the growth direction in the crystal grown under the axisymmetric flow was more homogeneous than that grown under the non-axisymmetric flow. Experimental results suggest that an inhomogeneous oxygen distribution could result from thermal asymmetry generated by rotating vortices in the non-axisymmetric flow.",
author = "Masahito Watanabe and Minoru Eguchi and Koichi Kakimoto and Haruhiko Ono and Shigeru Kimura and Taketoshi Hibiya",
year = "1995",
month = "6",
day = "1",
doi = "10.1016/0022-0248(95)00057-7",
language = "English",
volume = "151",
pages = "285--290",
journal = "Journal of Crystal Growth",
issn = "0022-0248",
publisher = "Elsevier",
number = "3-4",

}

TY - JOUR

T1 - Flow mode transition and its effects on crystal-melt interface shape and oxygen distribution for Czochralski-grown Si single crystals

AU - Watanabe, Masahito

AU - Eguchi, Minoru

AU - Kakimoto, Koichi

AU - Ono, Haruhiko

AU - Kimura, Shigeru

AU - Hibiya, Taketoshi

PY - 1995/6/1

Y1 - 1995/6/1

N2 - Flow visualization and crystal growth experiments confirm that the crystal-melt interface shape of the Czochralski-grown silicon crystal is changed by the flow-mode transition of molten silicon caused by the baroclinic instability. They also confirm that the oxygen distribution in the grown crystal is modified by the flow-mode transition. The flow visualization and crystal growth experiments were carried out under the same conditions. The shape of the crystal-melt interface was identified from the growth striation shape in the grown crystal by X-ray topography. The oxygen distribution in the grown crystal was studied using micro Fourier-transform infrared absorption spectroscopy. The crystal-melt interface was changed from a convex to a gull-winged shape by the transition from a non-axisymmetric flow with vortices to an axisymmetric flow. The oxygen distribution along the growth direction in the crystal grown under the axisymmetric flow was more homogeneous than that grown under the non-axisymmetric flow. Experimental results suggest that an inhomogeneous oxygen distribution could result from thermal asymmetry generated by rotating vortices in the non-axisymmetric flow.

AB - Flow visualization and crystal growth experiments confirm that the crystal-melt interface shape of the Czochralski-grown silicon crystal is changed by the flow-mode transition of molten silicon caused by the baroclinic instability. They also confirm that the oxygen distribution in the grown crystal is modified by the flow-mode transition. The flow visualization and crystal growth experiments were carried out under the same conditions. The shape of the crystal-melt interface was identified from the growth striation shape in the grown crystal by X-ray topography. The oxygen distribution in the grown crystal was studied using micro Fourier-transform infrared absorption spectroscopy. The crystal-melt interface was changed from a convex to a gull-winged shape by the transition from a non-axisymmetric flow with vortices to an axisymmetric flow. The oxygen distribution along the growth direction in the crystal grown under the axisymmetric flow was more homogeneous than that grown under the non-axisymmetric flow. Experimental results suggest that an inhomogeneous oxygen distribution could result from thermal asymmetry generated by rotating vortices in the non-axisymmetric flow.

UR - http://www.scopus.com/inward/record.url?scp=0029322990&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029322990&partnerID=8YFLogxK

U2 - 10.1016/0022-0248(95)00057-7

DO - 10.1016/0022-0248(95)00057-7

M3 - Article

VL - 151

SP - 285

EP - 290

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

SN - 0022-0248

IS - 3-4

ER -