Flow, temperature and concentration fields in reactive plasmas in an inductively coupled rf discharge —Characteristics in argon-oxygen and argon-nitrogen thermal plasmas—

Takayuki Watanabe, Naoto Tonoike, Takuya Honda, Atsushi Kanzawa

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Numerical simulations of RF argon-oxygen and argon-nitrogen thermal plasmas under atmospheric pressure were performed. Two-dimensional continuity, momentum, energy and species equations were solved simultaneously with the electromagnetic equations by using the SIMPLER algorithm. Dissociation and recombination rates of oxygen or nitrogen in the plasmas were taken into account in the numerical model. Distributions of the plasma enthalpy and concentration were measured with a water-cooled probe. The numerical results were in good agreement with the experimental ones. The argon-oxygen plasma has a strong recirculating eddy. 02 is dissociated completely downstream from the eddy except near the tube wall. In the argon-nitrogen plasma, the mass fraction of N2 is significant even in the high-temperature region.

Original languageEnglish
Pages (from-to)25-32
Number of pages8
JournalJOURNAL OF CHEMICAL ENGINEERING OF JAPAN
Volume24
Issue number1
DOIs
Publication statusPublished - Jan 1 1991

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Plasma Gases
Argon
Nitrogen
Oxygen
Plasmas
Nitrogen plasma
Temperature
Atmospheric pressure
Numerical models
Enthalpy
Momentum
Hot Temperature
Water
Computer simulation

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Chemical Engineering(all)

Cite this

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abstract = "Numerical simulations of RF argon-oxygen and argon-nitrogen thermal plasmas under atmospheric pressure were performed. Two-dimensional continuity, momentum, energy and species equations were solved simultaneously with the electromagnetic equations by using the SIMPLER algorithm. Dissociation and recombination rates of oxygen or nitrogen in the plasmas were taken into account in the numerical model. Distributions of the plasma enthalpy and concentration were measured with a water-cooled probe. The numerical results were in good agreement with the experimental ones. The argon-oxygen plasma has a strong recirculating eddy. 02 is dissociated completely downstream from the eddy except near the tube wall. In the argon-nitrogen plasma, the mass fraction of N2 is significant even in the high-temperature region.",
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T1 - Flow, temperature and concentration fields in reactive plasmas in an inductively coupled rf discharge —Characteristics in argon-oxygen and argon-nitrogen thermal plasmas—

AU - Watanabe, Takayuki

AU - Tonoike, Naoto

AU - Honda, Takuya

AU - Kanzawa, Atsushi

PY - 1991/1/1

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N2 - Numerical simulations of RF argon-oxygen and argon-nitrogen thermal plasmas under atmospheric pressure were performed. Two-dimensional continuity, momentum, energy and species equations were solved simultaneously with the electromagnetic equations by using the SIMPLER algorithm. Dissociation and recombination rates of oxygen or nitrogen in the plasmas were taken into account in the numerical model. Distributions of the plasma enthalpy and concentration were measured with a water-cooled probe. The numerical results were in good agreement with the experimental ones. The argon-oxygen plasma has a strong recirculating eddy. 02 is dissociated completely downstream from the eddy except near the tube wall. In the argon-nitrogen plasma, the mass fraction of N2 is significant even in the high-temperature region.

AB - Numerical simulations of RF argon-oxygen and argon-nitrogen thermal plasmas under atmospheric pressure were performed. Two-dimensional continuity, momentum, energy and species equations were solved simultaneously with the electromagnetic equations by using the SIMPLER algorithm. Dissociation and recombination rates of oxygen or nitrogen in the plasmas were taken into account in the numerical model. Distributions of the plasma enthalpy and concentration were measured with a water-cooled probe. The numerical results were in good agreement with the experimental ones. The argon-oxygen plasma has a strong recirculating eddy. 02 is dissociated completely downstream from the eddy except near the tube wall. In the argon-nitrogen plasma, the mass fraction of N2 is significant even in the high-temperature region.

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