Fluctuation of position and energy of a fine particle in plasma nanofabrication

Masaharu Shiratani, Masahiro Soejima, Hyunwoong Seo, Naho Itagaki, Kazunori Koga

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We are developing plasma nanofabrication, namely, nano and micro scale guided assembly using plasmas. We manipulate nano and micro objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of a fine particle (= each object) in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. In the first experiment, we grabbed a fine particle in plasma using an optical tweezers. The fine particle moves in a potential well made by the optical tweezers. This is a kind of Brownian motion and the position fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one. In the second experiment, we deduced interaction potential between two fine particles during their Coulomb collision. We found that there exist repulsive and attractive forces between them. The repulsive force is a screened Coulomb one, whereas the attractive force is likely a force due to a shadow effect, a non-collective attractive force. Moreover, we noted that there is a fluctuation of the potential, probably due to fluctuation of electrostatic force. These position and potential energy fluctuations may limit the accuracy of guided assembly using plasmas.

Original languageEnglish
Title of host publicationTHERMEC 2016
EditorsMihail Ionescu, Brajendra Mishra, Ernst Kozeschnik, Christof Sommitsch, T. Chandra, Brajendra Mishra
PublisherTrans Tech Publications Ltd
Pages1772-1777
Number of pages6
ISBN (Print)9783035711295
DOIs
Publication statusPublished - Jan 1 2017
Event9th International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2016 - Graz, Austria
Duration: May 29 2016Jun 3 2016

Publication series

NameMaterials Science Forum
Volume879
ISSN (Print)0255-5476

Other

Other9th International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2016
CountryAustria
CityGraz
Period5/29/166/3/16

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Shiratani, M., Soejima, M., Seo, H., Itagaki, N., & Koga, K. (2017). Fluctuation of position and energy of a fine particle in plasma nanofabrication. In M. Ionescu, B. Mishra, E. Kozeschnik, C. Sommitsch, T. Chandra, & B. Mishra (Eds.), THERMEC 2016 (pp. 1772-1777). (Materials Science Forum; Vol. 879). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.879.1772