TY - GEN
T1 - Fluctuation of position and energy of a fine particle in plasma nanofabrication
AU - Shiratani, Masaharu
AU - Soejima, Masahiro
AU - Seo, Hyunwoong
AU - Itagaki, Naho
AU - Koga, Kazunori
N1 - Funding Information:
This work was partly supported by JSPS KAKENHI Grant Number 26246036. We thank Prof. Seiichi Uchida, Ms. Ayumi Hamano, and Mr. Masayuki Noguchi in Kyushu University for providing their original image processing software.
PY - 2017
Y1 - 2017
N2 - We are developing plasma nanofabrication, namely, nano and micro scale guided assembly using plasmas. We manipulate nano and micro objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of a fine particle (= each object) in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. In the first experiment, we grabbed a fine particle in plasma using an optical tweezers. The fine particle moves in a potential well made by the optical tweezers. This is a kind of Brownian motion and the position fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one. In the second experiment, we deduced interaction potential between two fine particles during their Coulomb collision. We found that there exist repulsive and attractive forces between them. The repulsive force is a screened Coulomb one, whereas the attractive force is likely a force due to a shadow effect, a non-collective attractive force. Moreover, we noted that there is a fluctuation of the potential, probably due to fluctuation of electrostatic force. These position and potential energy fluctuations may limit the accuracy of guided assembly using plasmas.
AB - We are developing plasma nanofabrication, namely, nano and micro scale guided assembly using plasmas. We manipulate nano and micro objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of a fine particle (= each object) in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. In the first experiment, we grabbed a fine particle in plasma using an optical tweezers. The fine particle moves in a potential well made by the optical tweezers. This is a kind of Brownian motion and the position fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one. In the second experiment, we deduced interaction potential between two fine particles during their Coulomb collision. We found that there exist repulsive and attractive forces between them. The repulsive force is a screened Coulomb one, whereas the attractive force is likely a force due to a shadow effect, a non-collective attractive force. Moreover, we noted that there is a fluctuation of the potential, probably due to fluctuation of electrostatic force. These position and potential energy fluctuations may limit the accuracy of guided assembly using plasmas.
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U2 - 10.4028/www.scientific.net/MSF.879.1772
DO - 10.4028/www.scientific.net/MSF.879.1772
M3 - Conference contribution
AN - SCOPUS:85000714843
SN - 9783035711295
T3 - Materials Science Forum
SP - 1772
EP - 1777
BT - THERMEC 2016
A2 - Sommitsch, Christof
A2 - Ionescu, Mihail
A2 - Mishra, Brajendra
A2 - Mishra, Brajendra
A2 - Kozeschnik, Ernst
A2 - Chandra, T.
PB - Trans Tech Publications Ltd
T2 - 9th International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2016
Y2 - 29 May 2016 through 3 June 2016
ER -