Abstract
This paper reports the on-chip Fluid Separated Volumetric Flow Converter (FSVFC) capable of high speed cell position control with high resolution. There are various situations where we need to avoid mixing working fluid and actuation fluid for biological considerations, and such demand motivates the development of FSVFC. The proposed on-chip comb shaped FSVFC is composed of two separated groups of microfluidic channels arranged in parallel, and the main advantage is that actuation can be transmitted through the FSVFC without fluids being mixed. We succeeded in manipulating the position of a cell in microfluidic channel in the working area with the FSVFC as well as an online high speed vision sensor and a high speed PZT actuator. According to the experimental results, the average rise time of 12 miliseconds and the position control within 240 nanometers are achieved.
Original language | English |
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Article number | 7051144 |
Pages (from-to) | 1055-1058 |
Number of pages | 4 |
Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
Volume | 2015-February |
Issue number | February |
DOIs | |
Publication status | Published - Feb 26 2015 |
Externally published | Yes |
Event | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: Jan 18 2015 → Jan 22 2015 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering