For promoting science-based approach and important contribution to progress and expansion on world-leading industry

Syuhei Kurokawa, Hirokuni Hiyama, Seiichi Kondo

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)912-916
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume83
Issue number10
DOIs
Publication statusPublished - Jan 1 2017

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Bearing pads
MEMS
Semiconductor materials
Industry

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

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