Force measurement using quartz crystal resonator integrated with sample clamping unit

Shinya Sakuma, Noriaki Hasegawa, Yuichi Murozaki, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this paper, we propose a mechanical characterization system using a load sensing chip which consists a sample clamping integrated with a load sensor. In order to measure the mechanical characteristics of thin membrane, there are two keys for force measurement; a wide measurement range and the clamping method of thin sample. To meet these requirements, we integrate the load sensor using quartz crystal resonator (QCR) with the microfluidic suction device as a sample clamping unit. In order to obtain the high resolution for force sensing, we evaluated the effectiveness of thickness of QCR on the sensitivity. By using the thinner QCR of 15 pm, we achieved the 96812.7 Hz/N as the sensitivity of QCR load sensor. We fabricated the proposed load sensing chip using thinner QCR, and measured the tensile force of ILM model using the constructed measurement system.

Original languageEnglish
Title of host publication2017 IEEE International Conference on Cyborg and Bionic Systems, CBS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages198-201
Number of pages4
ISBN (Electronic)9781538631942
DOIs
Publication statusPublished - Jul 2 2017
Externally publishedYes
Event2017 IEEE International Conference on Cyborg and Bionic Systems, CBS 2017 - Beijing, China
Duration: Oct 17 2017Oct 19 2017

Publication series

Name2017 IEEE International Conference on Cyborg and Bionic Systems, CBS 2017
Volume2018-January

Other

Other2017 IEEE International Conference on Cyborg and Bionic Systems, CBS 2017
CountryChina
CityBeijing
Period10/17/1710/19/17

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Control and Optimization

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