Formation of carbon nanoparticle using Ar+CH4 high pressure nanosecond discharges

K. Koga, X. Dong, S. Iwashita, U. Czarnetzki, M. Shiratani

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

We have studied formation of carbon nanoparticles using Ar+CH4 high pressure nanosecond discharge non-thermal plasmas. Transition pressure from uniform glow discharges to filamentary ones was clarified to obtain conditions under which uniform glow discharges are sustained. We have produced nanoparticles using the glow discharges, and then we have collected nanoparticles on the grounded electrode by the filtered vacuum collection method. Size distribution analysis reveals that the CH4 concentration is an important parameter in controlling nanoparticle growth. We have also studied film deposition on the powered electrode and the grounded electrode. The deposition rate on the powered electrode is 7 times higher than that on the grounded electrode. Optical emission observations suggest that radical generation rate near the powered electrode is twice higher than that near the grounded electrode, leading to high deposition rate on the powered electrode.

Original languageEnglish
Article number012020
JournalJournal of Physics: Conference Series
Volume518
Issue number1
DOIs
Publication statusPublished - Jan 1 2014
Event26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, Japan
Duration: Sep 23 2013Sep 24 2013

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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