We have studied formation of carbon nanoparticles using Ar+CH4 high pressure nanosecond discharge non-thermal plasmas. Transition pressure from uniform glow discharges to filamentary ones was clarified to obtain conditions under which uniform glow discharges are sustained. We have produced nanoparticles using the glow discharges, and then we have collected nanoparticles on the grounded electrode by the filtered vacuum collection method. Size distribution analysis reveals that the CH4 concentration is an important parameter in controlling nanoparticle growth. We have also studied film deposition on the powered electrode and the grounded electrode. The deposition rate on the powered electrode is 7 times higher than that on the grounded electrode. Optical emission observations suggest that radical generation rate near the powered electrode is twice higher than that near the grounded electrode, leading to high deposition rate on the powered electrode.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 2014|
|Event||26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, Japan|
Duration: Sep 23 2013 → Sep 24 2013
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)