Formation of ceramic micro-channel by combination of laser beam machining and micro powder imprinting

Fujio Tsumori, Simon Hunt, Toshiko Osada, Hideshi Miura

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Microchannels made of polymers are commonly used for MEMS and micro-total analysis system (μTAS) devices. If a micro-channel structure can be constructed of a more stable material, the analysis of more reactant chemicals in harsher environments can be realized. In this research, we developed a process for fabricating a ceramic sheet with micro-channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as the sheet material. We employed laser machining to machine the sacrificial layer to form micro-channels inside the sheet. We also employed imprinting to form a structure with surface patterns and microchannels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and microchannels was obtained.

Original languageEnglish
Article number06FM03
JournalJapanese Journal of Applied Physics
Volume54
Issue number6
DOIs
Publication statusPublished - Jan 1 2015

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Laser beam machining
Microchannels
machining
laser beams
ceramics
Powders
microchannels
Powder metallurgy
Polymers
MEMS
Machining
laser machining
powder metallurgy
systems analysis
polymers
Heating
Lasers
microelectromechanical systems
heating

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Formation of ceramic micro-channel by combination of laser beam machining and micro powder imprinting. / Tsumori, Fujio; Hunt, Simon; Osada, Toshiko; Miura, Hideshi.

In: Japanese Journal of Applied Physics, Vol. 54, No. 6, 06FM03, 01.01.2015.

Research output: Contribution to journalArticle

@article{b767242ea1ef48e0ba2a39a35f7f1b1d,
title = "Formation of ceramic micro-channel by combination of laser beam machining and micro powder imprinting",
abstract = "Microchannels made of polymers are commonly used for MEMS and micro-total analysis system (μTAS) devices. If a micro-channel structure can be constructed of a more stable material, the analysis of more reactant chemicals in harsher environments can be realized. In this research, we developed a process for fabricating a ceramic sheet with micro-channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as the sheet material. We employed laser machining to machine the sacrificial layer to form micro-channels inside the sheet. We also employed imprinting to form a structure with surface patterns and microchannels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and microchannels was obtained.",
author = "Fujio Tsumori and Simon Hunt and Toshiko Osada and Hideshi Miura",
year = "2015",
month = "1",
day = "1",
doi = "10.7567/JJAP.54.06FM03",
language = "English",
volume = "54",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Institute of Physics",
number = "6",

}

TY - JOUR

T1 - Formation of ceramic micro-channel by combination of laser beam machining and micro powder imprinting

AU - Tsumori, Fujio

AU - Hunt, Simon

AU - Osada, Toshiko

AU - Miura, Hideshi

PY - 2015/1/1

Y1 - 2015/1/1

N2 - Microchannels made of polymers are commonly used for MEMS and micro-total analysis system (μTAS) devices. If a micro-channel structure can be constructed of a more stable material, the analysis of more reactant chemicals in harsher environments can be realized. In this research, we developed a process for fabricating a ceramic sheet with micro-channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as the sheet material. We employed laser machining to machine the sacrificial layer to form micro-channels inside the sheet. We also employed imprinting to form a structure with surface patterns and microchannels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and microchannels was obtained.

AB - Microchannels made of polymers are commonly used for MEMS and micro-total analysis system (μTAS) devices. If a micro-channel structure can be constructed of a more stable material, the analysis of more reactant chemicals in harsher environments can be realized. In this research, we developed a process for fabricating a ceramic sheet with micro-channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as the sheet material. We employed laser machining to machine the sacrificial layer to form micro-channels inside the sheet. We also employed imprinting to form a structure with surface patterns and microchannels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and microchannels was obtained.

UR - http://www.scopus.com/inward/record.url?scp=84930687667&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84930687667&partnerID=8YFLogxK

U2 - 10.7567/JJAP.54.06FM03

DO - 10.7567/JJAP.54.06FM03

M3 - Article

VL - 54

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 6

M1 - 06FM03

ER -