Liquid-phase epitaxial growth of Ge islands on insulator (GOI) using Ni-imprint-induced Si (111) micro-crystal seeds (〜1μmφ) is proposed. As a result, single-crystalline GOI (111) structures with large area (〜10μmφ) are realized. The Raman measurements show that the tensile strain (-0.2 %) which enhances carrier mobility is induced in the growth regions. Moreover, the transmission electron microscopy observations reveal no defects in the grown regions. This new method is can be employed to realize the multi-functional SiGe-LSI.
|Number of pages||5|
|Journal||IEICE technical report|
|Publication status||Published - Apr 16 2010|