Formation of Ge-on-Insulator Structures on Si platform by SiGe-mixing-triggered rapid-melting growth using RTA technique

Ichiro Mizushima, Taizoh Sadoh, Masanobu Miyao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationExtended Abstracts of the 13th International Workshop on Junction Technology 2013, IWJT 2013
PublisherIEEE Computer Society
Pages30-31
Number of pages2
DOIs
Publication statusPublished - 2013
Event2013 13th International Workshop on Junction Technology, IWJT 2013 - Kyoto, Japan
Duration: Jun 6 2013Jun 7 2013

Other

Other2013 13th International Workshop on Junction Technology, IWJT 2013
CountryJapan
CityKyoto
Period6/6/136/7/13

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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