Formation of low resistivity layers on singlecrystalline diamond by excimer laser irradiation

Eslam Abubakr, Abdelrahman Zkria, Yūki Katamune, Shinya Ohmagari, Kaname Imokawa, Hiroshi Ikenoue, Tsuyoshi Yoshitake

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

A singlecrystalline diamond (100)(Ib) plate immersed in 2% boric acid was irradiated by 193-nm ArF excimer laser beams for the formation of conductive layers on the surface of an insulating diamond substrate. From current-voltage measurements of the irradiated areas, it was confirmed that semiconducting layers with high conductivities are formed on the diamond surface. It was possible to form ohmic contacts by directly touching tungsten probes with the layer surface. Since Raman spectra exhibited only peaks due to diamond and no peaks due to amorphous carbon, the drastically enhanced conductivity is not attributed to amorphous carbon formation but due to the incorporation of boron atoms into the diamond subsurface from the dopant acid. Secondary ion mass spectrometric depth profile showed the incorporation of boron atoms up to 40 nm depths from the surface. From cathodoluminescence measurements at low temperatures, it was difficult to detect clear peaks for the substitutional incorporation of boron atoms into diamond lattices, which could be attributed to the small thickness of the doped layer for detection. The proposed technique is a new potential method for shallow doping and formation of conductive layers on singlecrystalline diamond surfaces.

Original languageEnglish
Pages (from-to)166-173
Number of pages8
JournalDiamond and Related Materials
Volume95
DOIs
Publication statusPublished - May 2019

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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