Formation of mesoscopic polymer dots by rubbing transfer

M. Sano, J. Okamura, S. Shinkai

Research output: Contribution to journalConference articlepeer-review

Abstract

Regularly spaced polymer dots are formed on a silicon surface by rubbing a thin polymer plate against the silicon substrate. Typically, the disk-shaped dots are 10 nm in height and 160 nm in diameter, and are separated by 340 nm from each other. It is found that the substrate temperature, the rubbing rate, the polymer viscoelasticity, and wettability against a substrate surface must be within a certain range to produce the aligned dots.

Original languageEnglish
Pages (from-to)155-158
Number of pages4
JournalMaterials Research Society Symposium - Proceedings
Volume576
DOIs
Publication statusPublished - 1999
Externally publishedYes
EventProceedings of the 1999 MRS Spring Meeting - Symposium DD, 'Organic/Inorganic Hybrid Materials' - San Francisco, CA, USA
Duration: Apr 5 1999Apr 9 1999

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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