Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp 3-bonded BN films

Shojiro Komatsu, Masaharu Shiratani

Research output: Contribution to journalArticle

Abstract

Scanning electron microscopic (SEM) observations revealed that individual and independent microcones of sp 3-bonded boron nitride grown by laser-activated plasma chemical vapor deposition were accompanied by ripple patterns spreading around them in the dimension of micrometers or sub-micrometers. The ripples were expanding equidistantly from each other and diminishing as they depart from a cone. The origin of the ripples was attributed to the interference of a direct laser cast on the plane surface and that reflected from the side of a cone; this model was satisfactorily in agreement with the SEM measurement, in which the side surface of a cone was mapped onto the plane surface surrounding the cone in the mathematical meaning of "bijection." This micro-optical effect due to the wave nature of laser was considered to indicate and support the photochemically activated growth reactions in this process.

Original languageEnglish
Pages (from-to)485-491
Number of pages7
JournalJournal of Materials Research
Volume29
Issue number4
DOIs
Publication statusPublished - Jan 27 2014

Fingerprint

Plasma CVD
ripples
Cones
cones
vapor deposition
Lasers
lasers
micrometers
Scanning
scanning
Electrons
Boron nitride
boron nitrides
casts
Chemical vapor deposition
electrons
Plasmas
interference

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp 3-bonded BN films. / Komatsu, Shojiro; Shiratani, Masaharu.

In: Journal of Materials Research, Vol. 29, No. 4, 27.01.2014, p. 485-491.

Research output: Contribution to journalArticle

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