Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp 3-bonded BN films

Shojiro Komatsu, Masaharu Shiratani

Research output: Contribution to journalArticle

Abstract

Scanning electron microscopic (SEM) observations revealed that individual and independent microcones of sp 3-bonded boron nitride grown by laser-activated plasma chemical vapor deposition were accompanied by ripple patterns spreading around them in the dimension of micrometers or sub-micrometers. The ripples were expanding equidistantly from each other and diminishing as they depart from a cone. The origin of the ripples was attributed to the interference of a direct laser cast on the plane surface and that reflected from the side of a cone; this model was satisfactorily in agreement with the SEM measurement, in which the side surface of a cone was mapped onto the plane surface surrounding the cone in the mathematical meaning of "bijection." This micro-optical effect due to the wave nature of laser was considered to indicate and support the photochemically activated growth reactions in this process.

Original languageEnglish
Pages (from-to)485-491
Number of pages7
JournalJournal of Materials Research
Volume29
Issue number4
DOIs
Publication statusPublished - Jan 27 2014

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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