Formation of microcrystalline diamond using a low-pressure inductively coupled plasma assisted by thermal decomposition of di-t-alkyl peroxide

Haruhiko Ito, Kungen Tsutsui, Masafumi Ito, Masaru Hori

Research output: Contribution to journalArticle

Abstract

Microcrystalline diamond has been successfully synthesized in a low-pressure inductively coupled plasma using di-t-alkyl peroxide. Di-t-alkyl peroxides are thermally decomposed into acetones and methyl radicals, which presumably serve as precursors for the formation of diamond on the silicon substrate at 943 K and 993 K. The deposits on the substrate were examined by scanning electron microscopy, Raman spectroscopy and X-ray photoelectron spectroscopy. It was found that the deposits contained a microcrystalline diamond phase even at a low pressure of 11 Pa. Diamond formation over a large area in low-pressure plasmas has been demonstrated by the present novel diamond deposition process using di-t-alkyl peroxide thermally decomposed as a feed gas.

Original languageEnglish
Pages (from-to)393-396
Number of pages4
JournalDiamond and Related Materials
Volume16
Issue number2
DOIs
Publication statusPublished - Feb 1 2007

Fingerprint

Diamond
Peroxides
Inductively coupled plasma
peroxides
thermal decomposition
Diamonds
Pyrolysis
low pressure
diamonds
Deposits
deposits
Silicon
Substrates
Acetone
acetone
Raman spectroscopy
X ray photoelectron spectroscopy
Gases
photoelectron spectroscopy
Plasmas

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Formation of microcrystalline diamond using a low-pressure inductively coupled plasma assisted by thermal decomposition of di-t-alkyl peroxide. / Ito, Haruhiko; Tsutsui, Kungen; Ito, Masafumi; Hori, Masaru.

In: Diamond and Related Materials, Vol. 16, No. 2, 01.02.2007, p. 393-396.

Research output: Contribution to journalArticle

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