Formation of microcrystalline diamond using a low-pressure inductively coupled plasma assisted by thermal decomposition of di-t-alkyl peroxide

Haruhiko Ito, Kungen Teii, Masafumi Ito, Masaru Hori

Research output: Contribution to journalArticlepeer-review

Abstract

Microcrystalline diamond has been successfully synthesized in a low-pressure inductively coupled plasma using di-t-alkyl peroxide. Di-t-alkyl peroxides are thermally decomposed into acetones and methyl radicals, which presumably serve as precursors for the formation of diamond on the silicon substrate at 943 K and 993 K. The deposits on the substrate were examined by scanning electron microscopy, Raman spectroscopy and X-ray photoelectron spectroscopy. It was found that the deposits contained a microcrystalline diamond phase even at a low pressure of 11 Pa. Diamond formation over a large area in low-pressure plasmas has been demonstrated by the present novel diamond deposition process using di-t-alkyl peroxide thermally decomposed as a feed gas.

Original languageEnglish
Pages (from-to)393-396
Number of pages4
JournalDiamond and Related Materials
Volume16
Issue number2
DOIs
Publication statusPublished - Feb 2007

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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