Formation of nanocrystalline diamond cones by reactive ion etching in microwave plasma for enhancing field emission

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Abstract

Cone-like nanostructures are formed on nitrogen-incorporated nanocrystalline diamond films by reactive ion etching (RIE) in a moderate-pressure microwave plasma. A thin Au layer is deposited on the film and followed by heating for transformation of an Au layer into Au nanoparticles as the mask for RIE. The diameter and spacing of Au nanoparticles depend upon the heating temperature and the thickness of Au. The smooth film surface is transformed into a number of cone-like protrusions with diameters, heights, and spacings of tens to a few hundreds of nm by RIE in a hydrogen/argon plasma and removal of Au residue in aqua regia. The formation of sharp nanostructures enhances field emission characteristics, so that the current density at high fields is increased largely up to the order of 10 -3 A cm -2 and the turn-on field is reduced down to around 1.8 V μm -1 , comparable to other carbon nanostructures, due to enhancement of local fields.

Original languageEnglish
Article number016003
JournalJapanese Journal of Applied Physics
Volume58
Issue number1
DOIs
Publication statusPublished - Jan 1 2019

Fingerprint

Reactive ion etching
Field emission
Cones
field emission
Nanostructures
Diamonds
cones
diamonds
Microwaves
etching
Plasmas
microwaves
spacing
Nanoparticles
Heating
nanoparticles
ions
heating
Diamond films
argon plasma

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

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title = "Formation of nanocrystalline diamond cones by reactive ion etching in microwave plasma for enhancing field emission",
abstract = "Cone-like nanostructures are formed on nitrogen-incorporated nanocrystalline diamond films by reactive ion etching (RIE) in a moderate-pressure microwave plasma. A thin Au layer is deposited on the film and followed by heating for transformation of an Au layer into Au nanoparticles as the mask for RIE. The diameter and spacing of Au nanoparticles depend upon the heating temperature and the thickness of Au. The smooth film surface is transformed into a number of cone-like protrusions with diameters, heights, and spacings of tens to a few hundreds of nm by RIE in a hydrogen/argon plasma and removal of Au residue in aqua regia. The formation of sharp nanostructures enhances field emission characteristics, so that the current density at high fields is increased largely up to the order of 10 -3 A cm -2 and the turn-on field is reduced down to around 1.8 V μm -1 , comparable to other carbon nanostructures, due to enhancement of local fields.",
author = "Koki Ota and Yoshimine Kato and Kungen Tsutsui",
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AU - Ota, Koki

AU - Kato, Yoshimine

AU - Tsutsui, Kungen

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N2 - Cone-like nanostructures are formed on nitrogen-incorporated nanocrystalline diamond films by reactive ion etching (RIE) in a moderate-pressure microwave plasma. A thin Au layer is deposited on the film and followed by heating for transformation of an Au layer into Au nanoparticles as the mask for RIE. The diameter and spacing of Au nanoparticles depend upon the heating temperature and the thickness of Au. The smooth film surface is transformed into a number of cone-like protrusions with diameters, heights, and spacings of tens to a few hundreds of nm by RIE in a hydrogen/argon plasma and removal of Au residue in aqua regia. The formation of sharp nanostructures enhances field emission characteristics, so that the current density at high fields is increased largely up to the order of 10 -3 A cm -2 and the turn-on field is reduced down to around 1.8 V μm -1 , comparable to other carbon nanostructures, due to enhancement of local fields.

AB - Cone-like nanostructures are formed on nitrogen-incorporated nanocrystalline diamond films by reactive ion etching (RIE) in a moderate-pressure microwave plasma. A thin Au layer is deposited on the film and followed by heating for transformation of an Au layer into Au nanoparticles as the mask for RIE. The diameter and spacing of Au nanoparticles depend upon the heating temperature and the thickness of Au. The smooth film surface is transformed into a number of cone-like protrusions with diameters, heights, and spacings of tens to a few hundreds of nm by RIE in a hydrogen/argon plasma and removal of Au residue in aqua regia. The formation of sharp nanostructures enhances field emission characteristics, so that the current density at high fields is increased largely up to the order of 10 -3 A cm -2 and the turn-on field is reduced down to around 1.8 V μm -1 , comparable to other carbon nanostructures, due to enhancement of local fields.

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