Formation of nanocrystalline Si by Au-catalyzed CH3SiH3 pulse jet CVD

Toshiaki Abe, Shouhei Anan, Fumiya Watanabe, Ryoji Takahashi, Yoshifumi Ikoma

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

    Fingerprint

    Dive into the research topics of 'Formation of nanocrystalline Si by Au-catalyzed CH3SiH3 pulse jet CVD'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Physics & Astronomy

    Chemical Compounds