Formation of nanostructured germanium-on-insulator for integration of multi-functional materials on a panel

M. Anisuzzaman, S. Muta, A. M. Hashim, M. Miyao, T. Sadoh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Single-crystal germanium-on-insulator (GOI) structures are essential to integrate high-speed transistors, high-efficiency solar cells, and non-volatile spintronic memories on a panel, because GOI structures can be used as templates for epitaxial growth of multi-functional materials, as well as channel layers with high-carrier mobility. We investigate formation of high-density nanostructured single crystalline GOI templates by SiGe-mixing-triggered rapid melting growth. The GOI structures consisting of dense strip-arrays and mesh-networks are examined. For strip-array patterns, rotation in crystal orientation along the growth direction is observed. However, such crystal rotation has been completely suppressed by employing mesh-network patterns. This enables high-density single-crystal GOI templates with narrow spacing (<500nm). Moreover, epitaxial growth of Ge on the GOI templates is examined by a molecular beam technique.

Original languageEnglish
Title of host publicationProceedings of the 19th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2012
Pages235-238
Number of pages4
Publication statusPublished - Oct 31 2012
Event19th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2012 - Kyoto, Japan
Duration: Jul 4 2012Jul 6 2012

Publication series

NameProceedings of the 19th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2012

Other

Other19th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2012
CountryJapan
CityKyoto
Period7/4/127/6/12

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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