Formation of p-n+ diamond homojunctions by shallow doping of phosphorus through liquid emersion excimer laser irradiation

Eslam Abubakr, Shinya Ohmagari, Abdelrahman Zkria, Hiroshi Ikenoue, Julien Pernot, Tsuyoshi Yoshitake

Research output: Contribution to journalArticlepeer-review

Abstract

We report the fabrication of p-n + diamond homojunction through an innovative approach of laser irradiation in liquid-ambient. A shallow phosphorus-doped layer with a high electric conductivity is processed on top of a p-type diamond substrate to form the p-n + homojunction. The current–voltage measurements at room temperature confirmed high conductivity of the induced n+ layer and showed exceptional rectification properties with an ideality factor of 1.07, excellent low on-resistance of 3.7 × 10−2 Ωcm2, and current density over 260 Acm−2 at forward-biasing of 10 V. Furthermore, undetectable leakage-current provides a rectification ratio exceeding 1010 at ±6 V, promoting the junction in UV detection applications.

Original languageEnglish
Pages (from-to)666-674
Number of pages9
JournalMaterials Research Letters
Volume10
Issue number10
DOIs
Publication statusPublished - 2022

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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