Formation of silicon nanodots from dysprosium-doped amorphous SiC x O y films grown by hot-filament assisted chemical vapor deposition of CH 3 SiH 3 and Dy(DPM) 3 gas jets

Yoshifumi Ikoma, Takayoshi Masaki, Shinji Kawai, Teruaki Motooka

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    Engineering & Materials Science

    Physics & Astronomy

    Chemical Compounds