Forming of SiO2 film by spin-on glass and CO2 laser annealing for gate insulator of polycrystalline silicon thin film transistors

Daisuke Hishitani, Masahiro Horita, Yasuaki Ishikawa, Hiroshi Ikenoue, Yosuke Watanabe, Yukiharu Uraoka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

CO2 laser was irradiated to per-hydro-polysilazane by us. Per-hydro-polysilazane as SiO2 precursor was spin-coated on the polycrystalline silicon substrate. CO2 laser was irradiated after prebaking Per-hydro-polysilazane film. Atomic force microscope analysis showed that the film after CO2 laser irradiation was formed flatly. Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry analysis showed that uniform SiO2 film in the depth direction was obtained by CO2 Laser Annealing compared with conventional furnace annealing.

Original languageEnglish
Title of host publicationIMFEDK 2013 - 2013 International Meeting for Future of Electron Devices, Kansai
Pages126-127
Number of pages2
DOIs
Publication statusPublished - Oct 21 2013
Event2013 11th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2013 - Osaka, Japan
Duration: Jun 5 2013Jun 6 2013

Publication series

NameIMFEDK 2013 - 2013 International Meeting for Future of Electron Devices, Kansai

Other

Other2013 11th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2013
CountryJapan
CityOsaka
Period6/5/136/6/13

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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    Hishitani, D., Horita, M., Ishikawa, Y., Ikenoue, H., Watanabe, Y., & Uraoka, Y. (2013). Forming of SiO2 film by spin-on glass and CO2 laser annealing for gate insulator of polycrystalline silicon thin film transistors. In IMFEDK 2013 - 2013 International Meeting for Future of Electron Devices, Kansai (pp. 126-127). [6602271] (IMFEDK 2013 - 2013 International Meeting for Future of Electron Devices, Kansai). https://doi.org/10.1109/IMFEDK.2013.6602271