Forming SiO2 thin film by CO2 laser annealing of spin-on glass on polycrystalline silicon thin film

Daisuke Hishitani, Masahiro Horita, Yasuaki Ishikawa, Hiroshi Ikenoue, Yosuke Watanabe, Yukiharu Uraoka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science