Fundamental investigation for stochastic metrology with multi-sensors for micro-system technology: In case of optical path length

M. Michihata, P. D. Tran, Terutake Hayashi, Y. Takaya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This study proposed the new approach to gain sensitivity of sensors. Usually, noise sources are considered to reduce for gaining sensitivity or dynamic range. In practical system, it is not the case that the noise can be reduced. In this study, therefore noises are positively utilized to enhance the sensitivity of sensors, which improves the sensor system by means of stochastic method. In this paper, a change of optical path length in interferometer was measured by using CCD camera as a multi-sensor in order to check the feasibility of this method.

Original languageEnglish
Title of host publication21st IMEKO TC2 Symposium on Photonics in Measurement
PublisherIMEKO-International Measurement Federation Secretariat
Publication statusPublished - 2013
Externally publishedYes
Event21st IMEKO TC2 Symposium on Photonics in Measurement - Gdansk, Poland
Duration: Sep 16 2013Sep 18 2013

Other

Other21st IMEKO TC2 Symposium on Photonics in Measurement
CountryPoland
CityGdansk
Period9/16/139/18/13

Fingerprint

optical paths
metrology
sensors
sensitivity
CCD cameras
dynamic range
interferometers

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

Michihata, M., Tran, P. D., Hayashi, T., & Takaya, Y. (2013). Fundamental investigation for stochastic metrology with multi-sensors for micro-system technology: In case of optical path length. In 21st IMEKO TC2 Symposium on Photonics in Measurement IMEKO-International Measurement Federation Secretariat.

Fundamental investigation for stochastic metrology with multi-sensors for micro-system technology : In case of optical path length. / Michihata, M.; Tran, P. D.; Hayashi, Terutake; Takaya, Y.

21st IMEKO TC2 Symposium on Photonics in Measurement. IMEKO-International Measurement Federation Secretariat, 2013.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Michihata, M, Tran, PD, Hayashi, T & Takaya, Y 2013, Fundamental investigation for stochastic metrology with multi-sensors for micro-system technology: In case of optical path length. in 21st IMEKO TC2 Symposium on Photonics in Measurement. IMEKO-International Measurement Federation Secretariat, 21st IMEKO TC2 Symposium on Photonics in Measurement, Gdansk, Poland, 9/16/13.
Michihata M, Tran PD, Hayashi T, Takaya Y. Fundamental investigation for stochastic metrology with multi-sensors for micro-system technology: In case of optical path length. In 21st IMEKO TC2 Symposium on Photonics in Measurement. IMEKO-International Measurement Federation Secretariat. 2013
Michihata, M. ; Tran, P. D. ; Hayashi, Terutake ; Takaya, Y. / Fundamental investigation for stochastic metrology with multi-sensors for micro-system technology : In case of optical path length. 21st IMEKO TC2 Symposium on Photonics in Measurement. IMEKO-International Measurement Federation Secretariat, 2013.
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