Fundamental investigation for stochastic metrology with multi-sensors for micro-system technology: In case of optical path length

M. Michihata, P. D. Tran, Terutake Hayashi, Y. Takaya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Fundamental investigation for stochastic metrology with multi-sensors for micro-system technology: In case of optical path length'. Together they form a unique fingerprint.

Physics & Astronomy