Gas sensing properties of indium oxide thin film on silicon substrate prepared by spin-coating method

Wan Young Chung, Go Sakai, Kengo Shimanoe, Norio Miura, Duk Dong Lee, Noboru Yamazoe

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

Thin films of indium oxide were prepared on a silicon substrate by a spin-coating method using a coating solution dissolving In(OH)3, acetic acid and ammonium carboxymethyl cellulose. The films consisted of a dense stack of fairly uniform grains, adhering well to the substrate, as observed with atomic force microscopy (AFM) and scanning electron microscopy (SEM). The film thickness was well controlled by repeating the spin-coating. The sensing properties of the In2O3 film to CO, H2 and C3H8 depended on the film thickness and temperature, fairly good sensing performance to CO being achieved with a 140-nm-thick film at 350°C. The contact between platinum electrode and In2O3 in these devices was found to be slightly non-Ohmic, unlike that in the sintered block type device.

Original languageEnglish
Pages (from-to)4994-4998
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume37
Issue number9 A
DOIs
Publication statusPublished - Sep 1998

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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