Generation and surface modification of Si nano-particles using SiH 4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics

Kazunori Koga, Giichiro Uchida, Kosuke Yamamoto, Munenori Sato, Yuki Kawashima, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani

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Physics & Astronomy