Generation of a low-electron-temperature ECR plasma using mirror magnetic field

Hiroshi Muta, Naho Itagaki, Mayuko Koga, Yoshinobu Kawai

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The mechanism to generate a low-electron-temperature electron cyclotron resonance plasma using magnetic filed and mixture ratio was investigated by means of simulation and experiment. As the working gas, a mixture of argon and nitrogen was used under the assumption of plasma nitriding. The results showed that the application of the magnetic mirror was valid for decreasing the electron temperature due to both effects of plasma confinement and temperature anisotropy. Furthermore, the addition of nitrogen was found to be effective to decrease the electron temperature approximately 2 eV due to the vibrational excitation of nitrogen molecules by electron impact.

Original languageEnglish
Pages (from-to)152-156
Number of pages5
JournalSurface and Coatings Technology
Volume174-175
DOIs
Publication statusPublished - Jan 1 2003

Fingerprint

Electron temperature
Mirrors
Nitrogen
electron energy
Magnetic fields
mirrors
Plasmas
nitrogen
Magnetic mirrors
magnetic fields
Plasma confinement
magnetic mirrors
plasma control
Electron cyclotron resonance
Argon
nitriding
Nitriding
plasma temperature
electron cyclotron resonance
electron impact

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Generation of a low-electron-temperature ECR plasma using mirror magnetic field. / Muta, Hiroshi; Itagaki, Naho; Koga, Mayuko; Kawai, Yoshinobu.

In: Surface and Coatings Technology, Vol. 174-175, 01.01.2003, p. 152-156.

Research output: Contribution to journalArticle

Muta, Hiroshi ; Itagaki, Naho ; Koga, Mayuko ; Kawai, Yoshinobu. / Generation of a low-electron-temperature ECR plasma using mirror magnetic field. In: Surface and Coatings Technology. 2003 ; Vol. 174-175. pp. 152-156.
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