The gettering of Cu and Ni impurities in intentionally contaminated SIMOX wafers have been studied by means of cross-sectional transmission electron microscopy nanoprobe energy dispersive x-ray spectroscopy, secondary ion mass spectrometry, and selective etching. The wafers with Cu or Ni surface concentrations ranged from about 10l2up to 1017 atom/cm2 were annealed at various temperatures followed by slow cooling to room temperature. Single and multistep thermal treatments were applied. It has been found that the buried oxide does not prevent the diffusion of both Cu and Ni contaminants from the top silicon layer into the bulk substrate at the whole investigated temperature range from 600 to 950°C. Moreover the effective gettering of Cu and Ni in the thin silicon substrate layer located just beneath the buried oxide has been observed and explained as being due to the heterogeneous impurity precipitation at stacking fault tetrahedra formed there during the SIMOX manufacturing. The gettering process has remained stable during the thermal simulation of CMOS device process of new generation ICs with 0.25 μm feature size.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Renewable Energy, Sustainability and the Environment
- Surfaces, Coatings and Films
- Materials Chemistry