Gettering of Fe by aluminum in p-type Cz silicon

S. H. Ahn, S. Zhao, A. L. Smith, L. L. Chalfoun, M. Platero, H. Nakashima, L. C. Kimerling

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds