Global analysis of effects of magnetic field configuration on melt-crystal interface shape and melt flow in CZ-Si crystal growth

Lijun Liu, Tomonori Kitashima, Koichi Kakimoto

Research output: Contribution to journalConference article

17 Citations (Scopus)

Abstract

In order to clarify the effects of configuration of magnetic field on the melt-crystal interface shape and the melt convection in a crucible, a set of numerical computations was conducted for a Czochralski furnace for silicon crystals of small diameter by global modeling. Under different combinations of crucible/crystal rotation rates, numerical comparisons were carried out for four configurations of magnetic field: a transverse magnetic field, a vertical magnetic field and two types of cusp-shaped magnetic fields. The computations revealed that each magnetic-field configuration has its own feature in affecting the melt convection and the melt-crystal interface shape when combining with variation in crystal/crucible rotation rates.

Original languageEnglish
Pages (from-to)e2135-e2139
JournalJournal of Crystal Growth
Volume275
Issue number1-2
DOIs
Publication statusPublished - Feb 15 2005

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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