TY - JOUR
T1 - Global analysis of effects of magnetic field configuration on melt-crystal interface shape and melt flow in CZ-Si crystal growth
AU - Liu, Lijun
AU - Kitashima, Tomonori
AU - Kakimoto, Koichi
N1 - Funding Information:
This work was supported by a Grant-in Aid for Scientific Research (B) 14350010 from the Japanese Ministry of Education, Science, Sports and Culture.
PY - 2005/2/15
Y1 - 2005/2/15
N2 - In order to clarify the effects of configuration of magnetic field on the melt-crystal interface shape and the melt convection in a crucible, a set of numerical computations was conducted for a Czochralski furnace for silicon crystals of small diameter by global modeling. Under different combinations of crucible/crystal rotation rates, numerical comparisons were carried out for four configurations of magnetic field: a transverse magnetic field, a vertical magnetic field and two types of cusp-shaped magnetic fields. The computations revealed that each magnetic-field configuration has its own feature in affecting the melt convection and the melt-crystal interface shape when combining with variation in crystal/crucible rotation rates.
AB - In order to clarify the effects of configuration of magnetic field on the melt-crystal interface shape and the melt convection in a crucible, a set of numerical computations was conducted for a Czochralski furnace for silicon crystals of small diameter by global modeling. Under different combinations of crucible/crystal rotation rates, numerical comparisons were carried out for four configurations of magnetic field: a transverse magnetic field, a vertical magnetic field and two types of cusp-shaped magnetic fields. The computations revealed that each magnetic-field configuration has its own feature in affecting the melt convection and the melt-crystal interface shape when combining with variation in crystal/crucible rotation rates.
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U2 - 10.1016/j.jcrysgro.2004.11.292
DO - 10.1016/j.jcrysgro.2004.11.292
M3 - Conference article
AN - SCOPUS:15944370558
SN - 0022-0248
VL - 275
SP - e2135-e2139
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 1-2
ER -