TY - JOUR
T1 - Gravity-assisted pulsed laser ablation for fabrication of compositional gradient thin film
AU - Nishiyama, Takashi
AU - Kajiwara, Takashi
AU - Morinaga, Sachi
AU - Nagayama, Kunihito
N1 - Funding Information:
The SEM–EDX analysis was performed using a Shimadzu SS-550 and a Genesis 2000 at the Center of Advanced Instrumental Analysis, Kyushu University. This research was partially supported by the Ministry of Education, Science, Sports and Culture, Grant-in-Aid for Young Scientists (B) , 21760540 , 2009. Furthermore, we thank Professor K. Takahashi for the helpful discussions and insights. We also thank the graduates who collaborated on this research with us.
PY - 2014/2/3
Y1 - 2014/2/3
N2 - A compositional gradient thin film of Fe/Si was fabricated by gravity-assisted pulsed laser ablation under a gravity field of 5.3 × 104 m/s2. Systematic experiments were conducted by varying the values of several parameters including the gravity, distance between the target and the substrate, and laser fluence. The atomic fraction of Fe was measured by scanning electron microscopy/energy dispersive X-ray spectroscopy. We found that the atomic fraction of Fe increases along the gravity direction, i.e., it exhibits an apparent spatial gradient. We also found the optimal laser fluence at which a thin film having the largest possible spatial compositional gradient is obtained. It is shown that the surface energy density on the substrate surface is the key parameter to control the compositional distribution. The relatively high laser fluence as well as the very narrow space between the target and the substrate are found to be essential to sputter the film material. A plausible model is presented to explain the experimental data.
AB - A compositional gradient thin film of Fe/Si was fabricated by gravity-assisted pulsed laser ablation under a gravity field of 5.3 × 104 m/s2. Systematic experiments were conducted by varying the values of several parameters including the gravity, distance between the target and the substrate, and laser fluence. The atomic fraction of Fe was measured by scanning electron microscopy/energy dispersive X-ray spectroscopy. We found that the atomic fraction of Fe increases along the gravity direction, i.e., it exhibits an apparent spatial gradient. We also found the optimal laser fluence at which a thin film having the largest possible spatial compositional gradient is obtained. It is shown that the surface energy density on the substrate surface is the key parameter to control the compositional distribution. The relatively high laser fluence as well as the very narrow space between the target and the substrate are found to be essential to sputter the film material. A plausible model is presented to explain the experimental data.
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U2 - 10.1016/j.tsf.2013.12.048
DO - 10.1016/j.tsf.2013.12.048
M3 - Article
AN - SCOPUS:84892786570
SN - 0040-6090
VL - 552
SP - 92
EP - 97
JO - Thin Solid Films
JF - Thin Solid Films
ER -