Abstract
Gas-source molecular beam epitaxy has been employed to grown thin films of SiC and AlN on vicinal and on-axis 6H-SiC(0001). Growth using the SiH4-C2H4 system resulted in 3C-SiC(111) epilayers under all conditions of reactant gas flow and temperatures. Films of 6H-SiC(OOOl) were deposited on vicinal 6H-SiC(0001) substrates using the SiH4-C2H4-H2 system at deposition temperatures ≥ 1350°C. In situ doping was achieved by intentional introduction of nitrogen and aluminum into the growing crystal. Monocrystalline AlN was deposited using evaporated Al and ECR plasma derived N or NH3. Films <50Å grown on the vicinal substrates had higher defect densities compared to those on the on-axis substrates due to the higher density of inversion boundaries forming at most SiC steps in the former material. Metal/AlN/6H-SiC (0001) thin film heterostructures which had a density of trapped charges as low as of 1 × 1011 cm-2 at room temperature were prepared without post growth treatment. Superior single crystal AlN/SiC heterostructures were achieved when very thin AlN was deposited on the on-axis substrates. Single phase monocrystalline solid solutions of (AlN)x(SiC)1-x were deposited between 0.2≤×≤0.8. A transition from the zincblende to the wurtzite structure was observed at x≈0.25.
| Original language | English |
|---|---|
| Pages (from-to) | 1282-1288 |
| Number of pages | 7 |
| Journal | Diamond and Related Materials |
| Volume | 6 |
| Issue number | 10 |
| Publication status | Published - Aug 1 1997 |
| Externally published | Yes |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Chemistry(all)
- Mechanical Engineering
- Physics and Astronomy(all)
- Materials Chemistry
- Electrical and Electronic Engineering
Cite this
Growth and doping via gas-source molecular beam epitaxy of SiC and SiC/AlN heterostructures and their microstructural and electrical characterization. / Kern, R. S.; Järrendahl, K.; Tanaka, S.; Davis, R. F.
In: Diamond and Related Materials, Vol. 6, No. 10, 01.08.1997, p. 1282-1288.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Growth and doping via gas-source molecular beam epitaxy of SiC and SiC/AlN heterostructures and their microstructural and electrical characterization
AU - Kern, R. S.
AU - Järrendahl, K.
AU - Tanaka, S.
AU - Davis, R. F.
PY - 1997/8/1
Y1 - 1997/8/1
N2 - Gas-source molecular beam epitaxy has been employed to grown thin films of SiC and AlN on vicinal and on-axis 6H-SiC(0001). Growth using the SiH4-C2H4 system resulted in 3C-SiC(111) epilayers under all conditions of reactant gas flow and temperatures. Films of 6H-SiC(OOOl) were deposited on vicinal 6H-SiC(0001) substrates using the SiH4-C2H4-H2 system at deposition temperatures ≥ 1350°C. In situ doping was achieved by intentional introduction of nitrogen and aluminum into the growing crystal. Monocrystalline AlN was deposited using evaporated Al and ECR plasma derived N or NH3. Films <50Å grown on the vicinal substrates had higher defect densities compared to those on the on-axis substrates due to the higher density of inversion boundaries forming at most SiC steps in the former material. Metal/AlN/6H-SiC (0001) thin film heterostructures which had a density of trapped charges as low as of 1 × 1011 cm-2 at room temperature were prepared without post growth treatment. Superior single crystal AlN/SiC heterostructures were achieved when very thin AlN was deposited on the on-axis substrates. Single phase monocrystalline solid solutions of (AlN)x(SiC)1-x were deposited between 0.2≤×≤0.8. A transition from the zincblende to the wurtzite structure was observed at x≈0.25.
AB - Gas-source molecular beam epitaxy has been employed to grown thin films of SiC and AlN on vicinal and on-axis 6H-SiC(0001). Growth using the SiH4-C2H4 system resulted in 3C-SiC(111) epilayers under all conditions of reactant gas flow and temperatures. Films of 6H-SiC(OOOl) were deposited on vicinal 6H-SiC(0001) substrates using the SiH4-C2H4-H2 system at deposition temperatures ≥ 1350°C. In situ doping was achieved by intentional introduction of nitrogen and aluminum into the growing crystal. Monocrystalline AlN was deposited using evaporated Al and ECR plasma derived N or NH3. Films <50Å grown on the vicinal substrates had higher defect densities compared to those on the on-axis substrates due to the higher density of inversion boundaries forming at most SiC steps in the former material. Metal/AlN/6H-SiC (0001) thin film heterostructures which had a density of trapped charges as low as of 1 × 1011 cm-2 at room temperature were prepared without post growth treatment. Superior single crystal AlN/SiC heterostructures were achieved when very thin AlN was deposited on the on-axis substrates. Single phase monocrystalline solid solutions of (AlN)x(SiC)1-x were deposited between 0.2≤×≤0.8. A transition from the zincblende to the wurtzite structure was observed at x≈0.25.
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M3 - Article
AN - SCOPUS:0042542979
VL - 6
SP - 1282
EP - 1288
JO - Diamond and Related Materials
JF - Diamond and Related Materials
SN - 0925-9635
IS - 10
ER -