Growth and doping via gas-source molecular beam epitaxy of SiC and SiC/AlN heterostructures and their microstructural and electrical characterization

R. S. Kern, K. Järrendahl, S. Tanaka, R. F. Davis

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Growth and doping via gas-source molecular beam epitaxy of SiC and SiC/AlN heterostructures and their microstructural and electrical characterization'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds