Growth of cubic AlN films on sapphire(0001) with atomic scale surface smoothness by pulsed laser deposition

Tomohiro Yoshida, Tsuyoshi Yoshitake, Kazushi Sumitani, Ryota Ohtani, You Nakagawa, Satoshi Mohri, Kunihito Nagayama

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    6 Citations (Scopus)

    Abstract

    We have previously reported that β-AlN crystallites with diameters of 0.5-1 μm were occasionally grown on sapphire(0001) by pulsed laser deposition, which implied that the migration mobility of the species deposited on the substrate surface might be an insufficient for the film growth of β-AlN. In the present study, in order to enhance the crystal growth of β-AlN, sapphire(0001) substrates with an atomically smoothness (step-sapphire) were employed. The growth conditions of α- and β-AlN extended to higher nitrogen-pressures, as compared to those using normal surface sapphire(0001) substrates (normal-sapphire). This is due to the enhancement in the mobility of the deposited species on the substrate surface.

    Original languageEnglish
    Title of host publicationTHERMEC 2009
    Pages2921-2926
    Number of pages6
    DOIs
    Publication statusPublished - Feb 9 2010
    Event6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009 - Berlin, Germany
    Duration: Aug 25 2009Aug 29 2009

    Publication series

    NameMaterials Science Forum
    Volume638-642
    ISSN (Print)0255-5476

    Other

    Other6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009
    CountryGermany
    CityBerlin
    Period8/25/098/29/09

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    All Science Journal Classification (ASJC) codes

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

    Cite this

    Yoshida, T., Yoshitake, T., Sumitani, K., Ohtani, R., Nakagawa, Y., Mohri, S., & Nagayama, K. (2010). Growth of cubic AlN films on sapphire(0001) with atomic scale surface smoothness by pulsed laser deposition. In THERMEC 2009 (pp. 2921-2926). (Materials Science Forum; Vol. 638-642). https://doi.org/10.4028/www.scientific.net/MSF.638-642.2921