Growth of cubic AlN films on sapphire(0001) with atomic scale surface smoothness by pulsed laser deposition

Tomohiro Yoshida, Tsuyoshi Yoshitake, Kazushi Sumitani, Ryota Ohtani, You Nakagawa, Satoshi Mohri, Kunihito Nagayama

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    6 Citations (Scopus)

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    Engineering & Materials Science

    Chemical Compounds

    Physics & Astronomy